6/28/2012	2:11:37 AM	Helium valve closed
6/28/2012	2:11:37 AM	H2 valve closed
6/28/2012	2:11:37 AM	BCl3 valve closed
6/28/2012	2:11:37 AM	PH3 valve closed
6/28/2012	2:11:37 AM	SiCl4 pre valve closed
6/28/2012	2:11:37 AM	SiCl4 post valve closed
6/28/2012	2:11:37 AM	Main Vac valve closed
6/28/2012	2:11:37 AM	Bypass valve closed
6/28/2012	2:11:37 AM	Bubbler valve closed
6/28/2012	2:11:37 AM	Helium MFC set to  0.000000
6/28/2012	2:11:37 AM	H2 MFC set to  0.000000
6/28/2012	2:11:37 AM	BCl3 MFC set to  0.000000
6/28/2012	2:11:37 AM	PH3 MFC set to  0.000000
6/28/2012	2:11:37 AM	SiCl4 MFC set to  0.000000
6/28/2012	2:11:37 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	2:11:37 AM	Tube furnace set to 0
6/28/2012	2:11:40 AM	Helium valve closed
6/28/2012	2:11:40 AM	BCl3 valve closed
6/28/2012	2:11:40 AM	PH3 valve closed
6/28/2012	2:11:40 AM	SiCl4 pre valve closed
6/28/2012	2:11:40 AM	SiCl4 post valve closed
6/28/2012	2:11:40 AM	Main Vac valve closed
6/28/2012	2:11:40 AM	Bypass valve closed
6/28/2012	2:11:40 AM	Bubbler valve closed
6/28/2012	2:11:40 AM	H2 valve opened
6/28/2012	2:11:40 AM	Helium MFC set to  0.000000
6/28/2012	2:11:40 AM	H2 MFC set to  500.000000
6/28/2012	2:11:40 AM	BCl3 MFC set to  0.000000
6/28/2012	2:11:40 AM	PH3 MFC set to  0.000000
6/28/2012	2:11:40 AM	SiCl4 MFC set to  0.000000
6/28/2012	2:11:40 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	2:11:40 AM	Tube furnace set to 0
6/28/2012	2:12:55 AM	Helium valve closed
6/28/2012	2:12:55 AM	BCl3 valve closed
6/28/2012	2:12:55 AM	PH3 valve closed
6/28/2012	2:12:55 AM	SiCl4 pre valve closed
6/28/2012	2:12:55 AM	SiCl4 post valve closed
6/28/2012	2:12:55 AM	Main Vac valve closed
6/28/2012	2:12:55 AM	Bypass valve closed
6/28/2012	2:12:55 AM	H2 valve opened
6/28/2012	2:12:55 AM	Bubbler valve opened
6/28/2012	2:12:55 AM	Helium MFC set to  0.000000
6/28/2012	2:12:55 AM	H2 MFC set to  500.000000
6/28/2012	2:12:55 AM	BCl3 MFC set to  0.000000
6/28/2012	2:12:55 AM	PH3 MFC set to  0.000000
6/28/2012	2:12:55 AM	SiCl4 MFC set to  0.000000
6/28/2012	2:12:55 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	2:12:55 AM	Tube furnace set to 0
6/28/2012	2:12:56 AM	Helium valve closed
6/28/2012	2:12:56 AM	BCl3 valve closed
6/28/2012	2:12:56 AM	PH3 valve closed
6/28/2012	2:12:56 AM	SiCl4 pre valve closed
6/28/2012	2:12:56 AM	SiCl4 post valve closed
6/28/2012	2:12:56 AM	Main Vac valve closed
6/28/2012	2:12:56 AM	Bypass valve closed
6/28/2012	2:12:57 AM	H2 valve opened
6/28/2012	2:12:57 AM	Bubbler valve opened
6/28/2012	2:12:57 AM	Helium MFC set to  0.000000
6/28/2012	2:12:57 AM	H2 MFC set to  500.000000
6/28/2012	2:12:57 AM	BCl3 MFC set to  0.000000
6/28/2012	2:12:57 AM	PH3 MFC set to  0.000000
6/28/2012	2:12:57 AM	SiCl4 MFC set to  0.000000
6/28/2012	2:12:57 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	2:12:57 AM	Tube furnace set to 1000
6/28/2012	2:37:57 AM	Helium valve closed
6/28/2012	2:37:57 AM	PH3 valve closed
6/28/2012	2:37:57 AM	Main Vac valve closed
6/28/2012	2:37:57 AM	Bypass valve closed
6/28/2012	2:37:57 AM	H2 valve opened
6/28/2012	2:37:57 AM	BCl3 valve opened
6/28/2012	2:37:57 AM	SiCl4 pre valve opened
6/28/2012	2:37:57 AM	SiCl4 post valve opened
6/28/2012	2:37:57 AM	Bubbler valve opened
6/28/2012	2:37:57 AM	Helium MFC set to  0.000000
6/28/2012	2:37:57 AM	H2 MFC set to  450.000000
6/28/2012	2:37:57 AM	BCl3 MFC set to  0.750000
6/28/2012	2:37:57 AM	PH3 MFC set to  0.000000
6/28/2012	2:37:57 AM	SiCl4 MFC set to  50.000000
6/28/2012	2:37:57 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	2:37:57 AM	Tube furnace set to 1000
6/28/2012	3:11:57 AM	Helium valve closed
6/28/2012	3:11:57 AM	BCl3 valve closed
6/28/2012	3:11:57 AM	PH3 valve closed
6/28/2012	3:11:57 AM	SiCl4 pre valve closed
6/28/2012	3:11:57 AM	SiCl4 post valve closed
6/28/2012	3:11:57 AM	Main Vac valve closed
6/28/2012	3:11:57 AM	Bypass valve closed
6/28/2012	3:11:57 AM	H2 valve opened
6/28/2012	3:11:57 AM	Bubbler valve opened
6/28/2012	3:11:57 AM	Helium MFC set to  0.000000
6/28/2012	3:11:57 AM	H2 MFC set to  500.000000
6/28/2012	3:11:57 AM	BCl3 MFC set to  0.000000
6/28/2012	3:11:57 AM	PH3 MFC set to  0.000000
6/28/2012	3:11:57 AM	SiCl4 MFC set to  0.000000
6/28/2012	3:11:57 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	3:11:57 AM	Tube furnace set to 750
6/28/2012	3:26:57 AM	H2 valve closed
6/28/2012	3:26:57 AM	BCl3 valve closed
6/28/2012	3:26:57 AM	PH3 valve closed
6/28/2012	3:26:57 AM	SiCl4 pre valve closed
6/28/2012	3:26:57 AM	SiCl4 post valve closed
6/28/2012	3:26:57 AM	Main Vac valve closed
6/28/2012	3:26:57 AM	Bypass valve closed
6/28/2012	3:26:57 AM	Helium valve opened
6/28/2012	3:26:57 AM	Bubbler valve opened
6/28/2012	3:26:57 AM	Helium MFC set to  500.000000
6/28/2012	3:26:57 AM	H2 MFC set to  0.000000
6/28/2012	3:26:57 AM	BCl3 MFC set to  0.000000
6/28/2012	3:26:57 AM	PH3 MFC set to  0.000000
6/28/2012	3:26:57 AM	SiCl4 MFC set to  0.000000
6/28/2012	3:26:57 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	3:26:57 AM	Tube furnace set to 0
6/28/2012	3:46:57 AM	Helium valve closed
6/28/2012	3:46:57 AM	H2 valve closed
6/28/2012	3:46:57 AM	BCl3 valve closed
6/28/2012	3:46:57 AM	PH3 valve closed
6/28/2012	3:46:57 AM	SiCl4 pre valve closed
6/28/2012	3:46:57 AM	SiCl4 post valve closed
6/28/2012	3:46:57 AM	Main Vac valve closed
6/28/2012	3:46:57 AM	Bypass valve closed
6/28/2012	3:46:57 AM	Bubbler valve closed
6/28/2012	3:46:57 AM	Helium MFC set to  0.000000
6/28/2012	3:46:57 AM	H2 MFC set to  0.000000
6/28/2012	3:46:57 AM	BCl3 MFC set to  0.000000
6/28/2012	3:46:57 AM	PH3 MFC set to  0.000000
6/28/2012	3:46:57 AM	SiCl4 MFC set to  0.000000
6/28/2012	3:46:57 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	3:46:57 AM	Tube furnace set to 0
6/28/2012	4:06:57 AM	Helium valve closed
6/28/2012	4:06:57 AM	H2 valve closed
6/28/2012	4:06:57 AM	BCl3 valve closed
6/28/2012	4:06:57 AM	PH3 valve closed
6/28/2012	4:06:57 AM	SiCl4 pre valve closed
6/28/2012	4:06:57 AM	SiCl4 post valve closed
6/28/2012	4:06:57 AM	Main Vac valve closed
6/28/2012	4:06:57 AM	Bubbler valve closed
6/28/2012	4:06:57 AM	Bypass valve opened
6/28/2012	4:06:57 AM	Helium MFC set to  0.000000
6/28/2012	4:06:57 AM	H2 MFC set to  0.000000
6/28/2012	4:06:57 AM	BCl3 MFC set to  0.000000
6/28/2012	4:06:57 AM	PH3 MFC set to  0.000000
6/28/2012	4:06:57 AM	SiCl4 MFC set to  0.000000
6/28/2012	4:06:57 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	4:06:58 AM	Tube furnace set to 0
6/28/2012	4:07:47 AM	Helium valve closed
6/28/2012	4:07:47 AM	H2 valve closed
6/28/2012	4:07:47 AM	BCl3 valve closed
6/28/2012	4:07:47 AM	PH3 valve closed
6/28/2012	4:07:47 AM	SiCl4 pre valve closed
6/28/2012	4:07:47 AM	SiCl4 post valve closed
6/28/2012	4:07:47 AM	Main Vac valve closed
6/28/2012	4:07:47 AM	Bubbler valve closed
6/28/2012	4:07:47 AM	Bypass valve opened
6/28/2012	4:07:47 AM	Helium MFC set to  0.000000
6/28/2012	4:07:47 AM	H2 MFC set to  0.000000
6/28/2012	4:07:47 AM	BCl3 MFC set to  0.000000
6/28/2012	4:07:47 AM	PH3 MFC set to  0.000000
6/28/2012	4:07:47 AM	SiCl4 MFC set to  0.000000
6/28/2012	4:07:47 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	4:07:48 AM	Tube furnace set to 0
6/28/2012	4:08:48 AM	Helium valve closed
6/28/2012	4:08:48 AM	H2 valve closed
6/28/2012	4:08:48 AM	BCl3 valve closed
6/28/2012	4:08:48 AM	PH3 valve closed
6/28/2012	4:08:48 AM	SiCl4 pre valve closed
6/28/2012	4:08:48 AM	SiCl4 post valve closed
6/28/2012	4:08:48 AM	Bypass valve closed
6/28/2012	4:08:48 AM	Bubbler valve closed
6/28/2012	4:08:48 AM	Main Vac valve opened
6/28/2012	4:08:48 AM	Helium MFC set to  0.000000
6/28/2012	4:08:48 AM	H2 MFC set to  0.000000
6/28/2012	4:08:48 AM	BCl3 MFC set to  0.000000
6/28/2012	4:08:48 AM	PH3 MFC set to  0.000000
6/28/2012	4:08:48 AM	SiCl4 MFC set to  0.000000
6/28/2012	4:08:48 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	4:08:48 AM	Tube furnace set to 0
6/28/2012	5:08:48 AM	Run finished at 5:08 AM
6/28/2012	7:44:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2012	7:44:09 AM	Recipe started at 7:44 AM
6/28/2012	7:44:09 AM	Helium valve closed
6/28/2012	7:44:09 AM	H2 valve closed
6/28/2012	7:44:09 AM	BCl3 valve closed
6/28/2012	7:44:09 AM	PH3 valve closed
6/28/2012	7:44:09 AM	SiCl4 pre valve closed
6/28/2012	7:44:09 AM	SiCl4 post valve closed
6/28/2012	7:44:09 AM	Main Vac valve closed
6/28/2012	7:44:09 AM	Bypass valve closed
6/28/2012	7:44:09 AM	Bubbler valve closed
6/28/2012	7:44:09 AM	Helium MFC set to  0.000000
6/28/2012	7:44:09 AM	H2 MFC set to  0.000000
6/28/2012	7:44:09 AM	BCl3 MFC set to  0.000000
6/28/2012	7:44:09 AM	PH3 MFC set to  0.000000
6/28/2012	7:44:09 AM	SiCl4 MFC set to  0.000000
6/28/2012	7:44:09 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	7:44:09 AM	Tube furnace set to 0
6/28/2012	7:44:12 AM	H2 valve closed
6/28/2012	7:44:12 AM	BCl3 valve closed
6/28/2012	7:44:12 AM	PH3 valve closed
6/28/2012	7:44:12 AM	SiCl4 pre valve closed
6/28/2012	7:44:12 AM	SiCl4 post valve closed
6/28/2012	7:44:12 AM	Main Vac valve closed
6/28/2012	7:44:12 AM	Bypass valve closed
6/28/2012	7:44:12 AM	Bubbler valve closed
6/28/2012	7:44:12 AM	Helium valve opened
6/28/2012	7:44:12 AM	Helium MFC set to  500.000000
6/28/2012	7:44:12 AM	H2 MFC set to  0.000000
6/28/2012	7:44:12 AM	BCl3 MFC set to  0.000000
6/28/2012	7:44:12 AM	PH3 MFC set to  0.000000
6/28/2012	7:44:12 AM	SiCl4 MFC set to  0.000000
6/28/2012	7:44:12 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	7:44:12 AM	Tube furnace set to 0
6/28/2012	7:45:24 AM	Helium valve closed
6/28/2012	7:45:24 AM	H2 valve closed
6/28/2012	7:45:24 AM	BCl3 valve closed
6/28/2012	7:45:24 AM	PH3 valve closed
6/28/2012	7:45:24 AM	SiCl4 pre valve closed
6/28/2012	7:45:24 AM	SiCl4 post valve closed
6/28/2012	7:45:24 AM	Main Vac valve closed
6/28/2012	7:45:24 AM	Bypass valve closed
6/28/2012	7:45:24 AM	Bubbler valve closed
6/28/2012	7:45:24 AM	Helium MFC set to  0.000000
6/28/2012	7:45:24 AM	H2 MFC set to  0.000000
6/28/2012	7:45:24 AM	BCl3 MFC set to  0.000000
6/28/2012	7:45:24 AM	PH3 MFC set to  0.000000
6/28/2012	7:45:24 AM	SiCl4 MFC set to  0.000000
6/28/2012	7:45:24 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	7:45:24 AM	Tube furnace set to 0
6/28/2012	7:45:25 AM	Run finished at 7:45 AM
6/28/2012	7:45:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2012	7:52:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2012	7:52:15 AM	Recipe started at 7:52 AM
6/28/2012	7:52:15 AM	Helium valve closed
6/28/2012	7:52:15 AM	H2 valve closed
6/28/2012	7:52:15 AM	BCl3 valve closed
6/28/2012	7:52:15 AM	PH3 valve closed
6/28/2012	7:52:15 AM	SiCl4 pre valve closed
6/28/2012	7:52:15 AM	SiCl4 post valve closed
6/28/2012	7:52:15 AM	Main Vac valve closed
6/28/2012	7:52:15 AM	Bubbler valve closed
6/28/2012	7:52:15 AM	Bypass valve opened
6/28/2012	7:52:15 AM	Helium MFC set to  0.000000
6/28/2012	7:52:15 AM	H2 MFC set to  0.000000
6/28/2012	7:52:15 AM	BCl3 MFC set to  0.000000
6/28/2012	7:52:15 AM	PH3 MFC set to  0.000000
6/28/2012	7:52:15 AM	SiCl4 MFC set to  0.000000
6/28/2012	7:52:15 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	7:52:15 AM	Tube furnace set to 0
6/28/2012	7:53:26 AM	Helium valve closed
6/28/2012	7:53:26 AM	H2 valve closed
6/28/2012	7:53:26 AM	BCl3 valve closed
6/28/2012	7:53:26 AM	PH3 valve closed
6/28/2012	7:53:26 AM	SiCl4 pre valve closed
6/28/2012	7:53:26 AM	SiCl4 post valve closed
6/28/2012	7:53:26 AM	Main Vac valve closed
6/28/2012	7:53:26 AM	Bubbler valve closed
6/28/2012	7:53:26 AM	Bypass valve opened
6/28/2012	7:53:26 AM	Helium MFC set to  0.000000
6/28/2012	7:53:26 AM	H2 MFC set to  0.000000
6/28/2012	7:53:26 AM	BCl3 MFC set to  0.000000
6/28/2012	7:53:26 AM	PH3 MFC set to  0.000000
6/28/2012	7:53:26 AM	SiCl4 MFC set to  0.000000
6/28/2012	7:53:26 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	7:53:26 AM	Tube furnace set to 0
6/28/2012	7:54:26 AM	Helium valve closed
6/28/2012	7:54:26 AM	H2 valve closed
6/28/2012	7:54:26 AM	BCl3 valve closed
6/28/2012	7:54:26 AM	PH3 valve closed
6/28/2012	7:54:26 AM	SiCl4 pre valve closed
6/28/2012	7:54:26 AM	SiCl4 post valve closed
6/28/2012	7:54:26 AM	Bypass valve closed
6/28/2012	7:54:26 AM	Bubbler valve closed
6/28/2012	7:54:26 AM	Main Vac valve opened
6/28/2012	7:54:26 AM	Helium MFC set to  0.000000
6/28/2012	7:54:26 AM	H2 MFC set to  0.000000
6/28/2012	7:54:26 AM	BCl3 MFC set to  0.000000
6/28/2012	7:54:26 AM	PH3 MFC set to  0.000000
6/28/2012	7:54:26 AM	SiCl4 MFC set to  0.000000
6/28/2012	7:54:26 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	7:54:26 AM	Tube furnace set to 0
6/28/2012	7:54:27 AM	Run finished at 7:54 AM
6/28/2012	7:54:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2012	8:07:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2012	8:07:17 AM	Recipe started at 8:07 AM
6/28/2012	8:07:17 AM	Helium valve closed
6/28/2012	8:07:17 AM	H2 valve closed
6/28/2012	8:07:17 AM	BCl3 valve closed
6/28/2012	8:07:17 AM	PH3 valve closed
6/28/2012	8:07:17 AM	SiCl4 pre valve closed
6/28/2012	8:07:17 AM	SiCl4 post valve closed
6/28/2012	8:07:17 AM	Main Vac valve closed
6/28/2012	8:07:17 AM	Bypass valve closed
6/28/2012	8:07:17 AM	Bubbler valve closed
6/28/2012	8:07:17 AM	Helium MFC set to  0.000000
6/28/2012	8:07:17 AM	H2 MFC set to  0.000000
6/28/2012	8:07:17 AM	BCl3 MFC set to  0.000000
6/28/2012	8:07:17 AM	PH3 MFC set to  0.000000
6/28/2012	8:07:17 AM	SiCl4 MFC set to  0.000000
6/28/2012	8:07:17 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	8:07:17 AM	Tube furnace set to 0
6/28/2012	8:07:20 AM	H2 valve closed
6/28/2012	8:07:21 AM	BCl3 valve closed
6/28/2012	8:07:21 AM	PH3 valve closed
6/28/2012	8:07:21 AM	SiCl4 pre valve closed
6/28/2012	8:07:21 AM	SiCl4 post valve closed
6/28/2012	8:07:21 AM	Main Vac valve closed
6/28/2012	8:07:21 AM	Bypass valve closed
6/28/2012	8:07:21 AM	Bubbler valve closed
6/28/2012	8:07:21 AM	Helium valve opened
6/28/2012	8:07:21 AM	Helium MFC set to  500.000000
6/28/2012	8:07:21 AM	H2 MFC set to  0.000000
6/28/2012	8:07:21 AM	BCl3 MFC set to  0.000000
6/28/2012	8:07:21 AM	PH3 MFC set to  0.000000
6/28/2012	8:07:21 AM	SiCl4 MFC set to  0.000000
6/28/2012	8:07:21 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	8:07:21 AM	Tube furnace set to 0
6/28/2012	8:08:33 AM	Helium valve closed
6/28/2012	8:08:33 AM	H2 valve closed
6/28/2012	8:08:33 AM	BCl3 valve closed
6/28/2012	8:08:33 AM	PH3 valve closed
6/28/2012	8:08:33 AM	SiCl4 pre valve closed
6/28/2012	8:08:33 AM	SiCl4 post valve closed
6/28/2012	8:08:33 AM	Main Vac valve closed
6/28/2012	8:08:33 AM	Bypass valve closed
6/28/2012	8:08:33 AM	Bubbler valve closed
6/28/2012	8:08:33 AM	Helium MFC set to  0.000000
6/28/2012	8:08:33 AM	H2 MFC set to  0.000000
6/28/2012	8:08:33 AM	BCl3 MFC set to  0.000000
6/28/2012	8:08:33 AM	PH3 MFC set to  0.000000
6/28/2012	8:08:33 AM	SiCl4 MFC set to  0.000000
6/28/2012	8:08:33 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	8:08:33 AM	Tube furnace set to 0
6/28/2012	8:08:34 AM	Run finished at 8:08 AM
6/28/2012	8:08:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2012	8:10:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2012	8:10:53 AM	Recipe started at 8:10 AM
6/28/2012	8:10:53 AM	Helium valve closed
6/28/2012	8:10:53 AM	H2 valve closed
6/28/2012	8:10:53 AM	BCl3 valve closed
6/28/2012	8:10:53 AM	PH3 valve closed
6/28/2012	8:10:54 AM	SiCl4 pre valve closed
6/28/2012	8:10:54 AM	SiCl4 post valve closed
6/28/2012	8:10:54 AM	Main Vac valve closed
6/28/2012	8:10:54 AM	Bubbler valve closed
6/28/2012	8:10:54 AM	Bypass valve opened
6/28/2012	8:10:54 AM	Helium MFC set to  0.000000
6/28/2012	8:10:54 AM	H2 MFC set to  0.000000
6/28/2012	8:10:54 AM	BCl3 MFC set to  0.000000
6/28/2012	8:10:54 AM	PH3 MFC set to  0.000000
6/28/2012	8:10:54 AM	SiCl4 MFC set to  0.000000
6/28/2012	8:10:54 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	8:10:54 AM	Tube furnace set to 0
6/28/2012	8:11:57 AM	Helium valve closed
6/28/2012	8:11:57 AM	H2 valve closed
6/28/2012	8:11:57 AM	BCl3 valve closed
6/28/2012	8:11:57 AM	PH3 valve closed
6/28/2012	8:11:57 AM	SiCl4 pre valve closed
6/28/2012	8:11:57 AM	SiCl4 post valve closed
6/28/2012	8:11:58 AM	Main Vac valve closed
6/28/2012	8:11:58 AM	Bubbler valve closed
6/28/2012	8:11:58 AM	Bypass valve opened
6/28/2012	8:11:58 AM	Helium MFC set to  0.000000
6/28/2012	8:11:58 AM	H2 MFC set to  0.000000
6/28/2012	8:11:58 AM	BCl3 MFC set to  0.000000
6/28/2012	8:11:58 AM	PH3 MFC set to  0.000000
6/28/2012	8:11:58 AM	SiCl4 MFC set to  0.000000
6/28/2012	8:11:58 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	8:11:58 AM	Tube furnace set to 0
6/28/2012	8:12:58 AM	Helium valve closed
6/28/2012	8:12:58 AM	H2 valve closed
6/28/2012	8:12:58 AM	BCl3 valve closed
6/28/2012	8:12:58 AM	PH3 valve closed
6/28/2012	8:12:58 AM	SiCl4 pre valve closed
6/28/2012	8:12:58 AM	SiCl4 post valve closed
6/28/2012	8:12:58 AM	Bypass valve closed
6/28/2012	8:12:58 AM	Bubbler valve closed
6/28/2012	8:12:58 AM	Main Vac valve opened
6/28/2012	8:12:58 AM	Helium MFC set to  0.000000
6/28/2012	8:12:58 AM	H2 MFC set to  0.000000
6/28/2012	8:12:58 AM	BCl3 MFC set to  0.000000
6/28/2012	8:12:58 AM	PH3 MFC set to  0.000000
6/28/2012	8:12:58 AM	SiCl4 MFC set to  0.000000
6/28/2012	8:12:58 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	8:12:58 AM	Tube furnace set to 0
6/28/2012	8:12:59 AM	Run finished at 8:12 AM
6/28/2012	8:12:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2012	8:14:26 AM	Recipe started at 8:14 AM
6/28/2012	8:14:26 AM	Helium valve closed
6/28/2012	8:14:26 AM	H2 valve closed
6/28/2012	8:14:26 AM	BCl3 valve closed
6/28/2012	8:14:26 AM	PH3 valve closed
6/28/2012	8:14:26 AM	SiCl4 pre valve closed
6/28/2012	8:14:26 AM	SiCl4 post valve closed
6/28/2012	8:14:26 AM	Bypass valve closed
6/28/2012	8:14:26 AM	Bubbler valve closed
6/28/2012	8:14:26 AM	Main Vac valve opened
6/28/2012	8:14:26 AM	Helium MFC set to  0.000000
6/28/2012	8:14:26 AM	H2 MFC set to  0.000000
6/28/2012	8:14:26 AM	BCl3 MFC set to  0.000000
6/28/2012	8:14:26 AM	PH3 MFC set to  0.000000
6/28/2012	8:14:26 AM	SiCl4 MFC set to  0.000000
6/28/2012	8:14:26 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	8:14:26 AM	Tube furnace set to 0
6/28/2012	8:28:01 AM	Run aborted at 8:28 AM
6/28/2012	8:28:01 AM	Helium valve closed
6/28/2012	8:28:01 AM	H2 valve closed
6/28/2012	8:28:01 AM	BCl3 valve closed
6/28/2012	8:28:01 AM	PH3 valve closed
6/28/2012	8:28:01 AM	SiCl4 pre valve closed
6/28/2012	8:28:01 AM	SiCl4 post valve closed
6/28/2012	8:28:01 AM	Bypass valve closed
6/28/2012	8:28:01 AM	Main Vac valve closed
6/28/2012	8:28:01 AM	Bubbler valve closed
6/28/2012	8:28:01 AM	Helium MFC set to  0.000000
6/28/2012	8:28:01 AM	H2 MFC set to  0.000000
6/28/2012	8:28:01 AM	BCl3 MFC set to  0.000000
6/28/2012	8:28:01 AM	PH3 MFC set to  0.000000
6/28/2012	8:28:01 AM	SiCl4 MFC set to  0.000000
6/28/2012	8:28:01 AM	Tube furnace set to 0
6/28/2012	8:28:19 AM	Recipe started at 8:28 AM
6/28/2012	8:28:19 AM	Helium valve closed
6/28/2012	8:28:19 AM	H2 valve closed
6/28/2012	8:28:19 AM	BCl3 valve closed
6/28/2012	8:28:19 AM	PH3 valve closed
6/28/2012	8:28:19 AM	SiCl4 pre valve closed
6/28/2012	8:28:19 AM	SiCl4 post valve closed
6/28/2012	8:28:19 AM	Bypass valve closed
6/28/2012	8:28:19 AM	Bubbler valve closed
6/28/2012	8:28:19 AM	Main Vac valve opened
6/28/2012	8:28:19 AM	Helium MFC set to  0.000000
6/28/2012	8:28:19 AM	H2 MFC set to  0.000000
6/28/2012	8:28:19 AM	BCl3 MFC set to  0.000000
6/28/2012	8:28:19 AM	PH3 MFC set to  0.000000
6/28/2012	8:28:19 AM	SiCl4 MFC set to  0.000000
6/28/2012	8:28:19 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	8:28:19 AM	Tube furnace set to 0
6/28/2012	8:43:19 AM	Helium valve closed
6/28/2012	8:43:19 AM	H2 valve closed
6/28/2012	8:43:19 AM	BCl3 valve closed
6/28/2012	8:43:19 AM	PH3 valve closed
6/28/2012	8:43:19 AM	SiCl4 pre valve closed
6/28/2012	8:43:19 AM	SiCl4 post valve closed
6/28/2012	8:43:19 AM	Main Vac valve closed
6/28/2012	8:43:19 AM	Bypass valve closed
6/28/2012	8:43:19 AM	Bubbler valve closed
6/28/2012	8:43:19 AM	Helium MFC set to  0.000000
6/28/2012	8:43:19 AM	H2 MFC set to  0.000000
6/28/2012	8:43:19 AM	BCl3 MFC set to  0.000000
6/28/2012	8:43:19 AM	PH3 MFC set to  0.000000
6/28/2012	8:43:19 AM	SiCl4 MFC set to  0.000000
6/28/2012	8:43:19 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	8:43:19 AM	Tube furnace set to 0
6/28/2012	8:43:22 AM	Helium valve closed
6/28/2012	8:43:22 AM	BCl3 valve closed
6/28/2012	8:43:22 AM	PH3 valve closed
6/28/2012	8:43:22 AM	SiCl4 pre valve closed
6/28/2012	8:43:22 AM	SiCl4 post valve closed
6/28/2012	8:43:22 AM	Main Vac valve closed
6/28/2012	8:43:22 AM	Bypass valve closed
6/28/2012	8:43:22 AM	Bubbler valve closed
6/28/2012	8:43:22 AM	H2 valve opened
6/28/2012	8:43:22 AM	Helium MFC set to  0.000000
6/28/2012	8:43:22 AM	H2 MFC set to  500.000000
6/28/2012	8:43:22 AM	BCl3 MFC set to  0.000000
6/28/2012	8:43:22 AM	PH3 MFC set to  0.000000
6/28/2012	8:43:22 AM	SiCl4 MFC set to  0.000000
6/28/2012	8:43:22 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	8:43:22 AM	Tube furnace set to 0
6/28/2012	8:44:38 AM	Helium valve closed
6/28/2012	8:44:38 AM	BCl3 valve closed
6/28/2012	8:44:38 AM	PH3 valve closed
6/28/2012	8:44:38 AM	SiCl4 pre valve closed
6/28/2012	8:44:38 AM	SiCl4 post valve closed
6/28/2012	8:44:38 AM	Main Vac valve closed
6/28/2012	8:44:38 AM	Bypass valve closed
6/28/2012	8:44:38 AM	H2 valve opened
6/28/2012	8:44:38 AM	Bubbler valve opened
6/28/2012	8:44:38 AM	Helium MFC set to  0.000000
6/28/2012	8:44:38 AM	H2 MFC set to  500.000000
6/28/2012	8:44:38 AM	BCl3 MFC set to  0.000000
6/28/2012	8:44:38 AM	PH3 MFC set to  0.000000
6/28/2012	8:44:38 AM	SiCl4 MFC set to  0.000000
6/28/2012	8:44:38 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	8:44:38 AM	Tube furnace set to 0
6/28/2012	8:44:39 AM	Helium valve closed
6/28/2012	8:44:39 AM	BCl3 valve closed
6/28/2012	8:44:39 AM	PH3 valve closed
6/28/2012	8:44:39 AM	SiCl4 pre valve closed
6/28/2012	8:44:39 AM	SiCl4 post valve closed
6/28/2012	8:44:39 AM	Main Vac valve closed
6/28/2012	8:44:39 AM	Bypass valve closed
6/28/2012	8:44:39 AM	H2 valve opened
6/28/2012	8:44:39 AM	Bubbler valve opened
6/28/2012	8:44:39 AM	Helium MFC set to  0.000000
6/28/2012	8:44:39 AM	H2 MFC set to  500.000000
6/28/2012	8:44:39 AM	BCl3 MFC set to  0.000000
6/28/2012	8:44:39 AM	PH3 MFC set to  0.000000
6/28/2012	8:44:39 AM	SiCl4 MFC set to  0.000000
6/28/2012	8:44:39 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	8:44:39 AM	Tube furnace set to 1000
6/28/2012	9:09:39 AM	Helium valve closed
6/28/2012	9:09:39 AM	BCl3 valve closed
6/28/2012	9:09:39 AM	PH3 valve closed
6/28/2012	9:09:39 AM	Main Vac valve closed
6/28/2012	9:09:39 AM	Bypass valve closed
6/28/2012	9:09:39 AM	H2 valve opened
6/28/2012	9:09:39 AM	SiCl4 pre valve opened
6/28/2012	9:09:39 AM	SiCl4 post valve opened
6/28/2012	9:09:39 AM	Bubbler valve opened
6/28/2012	9:09:39 AM	Helium MFC set to  0.000000
6/28/2012	9:09:39 AM	H2 MFC set to  450.000000
6/28/2012	9:09:39 AM	BCl3 MFC set to  0.000000
6/28/2012	9:09:39 AM	PH3 MFC set to  0.000000
6/28/2012	9:09:39 AM	SiCl4 MFC set to  50.000000
6/28/2012	9:09:39 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	9:09:39 AM	Tube furnace set to 1000
6/28/2012	9:43:39 AM	Helium valve closed
6/28/2012	9:43:39 AM	BCl3 valve closed
6/28/2012	9:43:39 AM	PH3 valve closed
6/28/2012	9:43:39 AM	SiCl4 pre valve closed
6/28/2012	9:43:39 AM	SiCl4 post valve closed
6/28/2012	9:43:39 AM	Main Vac valve closed
6/28/2012	9:43:39 AM	Bypass valve closed
6/28/2012	9:43:39 AM	H2 valve opened
6/28/2012	9:43:39 AM	Bubbler valve opened
6/28/2012	9:43:39 AM	Helium MFC set to  0.000000
6/28/2012	9:43:39 AM	H2 MFC set to  500.000000
6/28/2012	9:43:39 AM	BCl3 MFC set to  0.000000
6/28/2012	9:43:39 AM	PH3 MFC set to  0.000000
6/28/2012	9:43:39 AM	SiCl4 MFC set to  0.000000
6/28/2012	9:43:39 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	9:43:39 AM	Tube furnace set to 750
6/28/2012	9:58:39 AM	H2 valve closed
6/28/2012	9:58:39 AM	BCl3 valve closed
6/28/2012	9:58:39 AM	PH3 valve closed
6/28/2012	9:58:39 AM	SiCl4 pre valve closed
6/28/2012	9:58:39 AM	SiCl4 post valve closed
6/28/2012	9:58:39 AM	Main Vac valve closed
6/28/2012	9:58:39 AM	Bypass valve closed
6/28/2012	9:58:39 AM	Helium valve opened
6/28/2012	9:58:39 AM	Bubbler valve opened
6/28/2012	9:58:39 AM	Helium MFC set to  500.000000
6/28/2012	9:58:39 AM	H2 MFC set to  0.000000
6/28/2012	9:58:39 AM	BCl3 MFC set to  0.000000
6/28/2012	9:58:39 AM	PH3 MFC set to  0.000000
6/28/2012	9:58:39 AM	SiCl4 MFC set to  0.000000
6/28/2012	9:58:39 AM	Bypass solenoid MFC set to  0.000000
6/28/2012	9:58:40 AM	Tube furnace set to 0
6/28/2012	10:07:46 AM	Run aborted at 10:07 AM
6/28/2012	10:07:46 AM	Helium valve closed
6/28/2012	10:07:46 AM	H2 valve closed
6/28/2012	10:07:46 AM	BCl3 valve closed
6/28/2012	10:07:46 AM	PH3 valve closed
6/28/2012	10:07:46 AM	SiCl4 pre valve closed
6/28/2012	10:07:46 AM	SiCl4 post valve closed
6/28/2012	10:07:46 AM	Bypass valve closed
6/28/2012	10:07:46 AM	Main Vac valve closed
6/28/2012	10:07:46 AM	Bubbler valve closed
6/28/2012	10:07:46 AM	Helium MFC set to  0.000000
6/28/2012	10:07:46 AM	H2 MFC set to  0.000000
6/28/2012	10:07:46 AM	BCl3 MFC set to  0.000000
6/28/2012	10:07:46 AM	PH3 MFC set to  0.000000
6/28/2012	10:07:46 AM	SiCl4 MFC set to  0.000000
6/28/2012	10:07:46 AM	Tube furnace set to 0
6/28/2012	12:37:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2012	12:37:28 PM	Recipe started at 12:37 PM
6/28/2012	12:37:28 PM	Helium valve closed
6/28/2012	12:37:28 PM	H2 valve closed
6/28/2012	12:37:28 PM	BCl3 valve closed
6/28/2012	12:37:28 PM	PH3 valve closed
6/28/2012	12:37:28 PM	SiCl4 pre valve closed
6/28/2012	12:37:28 PM	SiCl4 post valve closed
6/28/2012	12:37:28 PM	Main Vac valve closed
6/28/2012	12:37:28 PM	Bypass valve closed
6/28/2012	12:37:28 PM	Bubbler valve closed
6/28/2012	12:37:28 PM	Helium MFC set to  0.000000
6/28/2012	12:37:28 PM	H2 MFC set to  0.000000
6/28/2012	12:37:28 PM	BCl3 MFC set to  0.000000
6/28/2012	12:37:28 PM	PH3 MFC set to  0.000000
6/28/2012	12:37:28 PM	SiCl4 MFC set to  0.000000
6/28/2012	12:37:28 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	12:37:28 PM	Tube furnace set to 0
6/28/2012	12:37:31 PM	H2 valve closed
6/28/2012	12:37:31 PM	BCl3 valve closed
6/28/2012	12:37:31 PM	PH3 valve closed
6/28/2012	12:37:31 PM	SiCl4 pre valve closed
6/28/2012	12:37:31 PM	SiCl4 post valve closed
6/28/2012	12:37:31 PM	Main Vac valve closed
6/28/2012	12:37:31 PM	Bypass valve closed
6/28/2012	12:37:31 PM	Bubbler valve closed
6/28/2012	12:37:31 PM	Helium valve opened
6/28/2012	12:37:31 PM	Helium MFC set to  500.000000
6/28/2012	12:37:31 PM	H2 MFC set to  0.000000
6/28/2012	12:37:31 PM	BCl3 MFC set to  0.000000
6/28/2012	12:37:31 PM	PH3 MFC set to  0.000000
6/28/2012	12:37:31 PM	SiCl4 MFC set to  0.000000
6/28/2012	12:37:31 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	12:37:32 PM	Tube furnace set to 0
6/28/2012	12:37:41 PM	Helium valve closed
6/28/2012	12:37:41 PM	H2 valve closed
6/28/2012	12:37:41 PM	BCl3 valve closed
6/28/2012	12:37:41 PM	PH3 valve closed
6/28/2012	12:37:41 PM	SiCl4 pre valve closed
6/28/2012	12:37:41 PM	SiCl4 post valve closed
6/28/2012	12:37:41 PM	Main Vac valve closed
6/28/2012	12:37:41 PM	Bypass valve closed
6/28/2012	12:37:41 PM	Bubbler valve closed
6/28/2012	12:37:41 PM	Helium MFC set to  0.000000
6/28/2012	12:37:41 PM	H2 MFC set to  0.000000
6/28/2012	12:37:41 PM	BCl3 MFC set to  0.000000
6/28/2012	12:37:41 PM	PH3 MFC set to  0.000000
6/28/2012	12:37:41 PM	SiCl4 MFC set to  0.000000
6/28/2012	12:37:41 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	12:37:41 PM	Tube furnace set to 0
6/28/2012	12:37:42 PM	Run finished at 12:37 PM
6/28/2012	12:37:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2012	12:39:33 PM	SiCl4 post valve opened
6/28/2012	12:39:33 PM	SiCl4 pre valve opened
6/28/2012	12:39:44 PM	Bypass valve opened
6/28/2012	12:40:46 PM	Main Vac valve opened
6/28/2012	12:40:46 PM	Bypass valve closed
6/28/2012	12:40:51 PM	SiCl4 MFC set to  10.000000
6/28/2012	12:41:02 PM	SiCl4 pre valve closed
6/28/2012	12:41:15 PM	SiCl4 pre valve opened
6/28/2012	12:41:24 PM	SiCl4 pre valve closed
6/28/2012	12:41:59 PM	Main Vac valve closed
6/28/2012	12:42:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2012	12:42:01 PM	Recipe started at 12:42 PM
6/28/2012	12:42:01 PM	Helium valve closed
6/28/2012	12:42:01 PM	H2 valve closed
6/28/2012	12:42:01 PM	BCl3 valve closed
6/28/2012	12:42:01 PM	PH3 valve closed
6/28/2012	12:42:01 PM	SiCl4 pre valve closed
6/28/2012	12:42:02 PM	SiCl4 post valve closed
6/28/2012	12:42:02 PM	Main Vac valve closed
6/28/2012	12:42:02 PM	Bypass valve closed
6/28/2012	12:42:02 PM	Bubbler valve closed
6/28/2012	12:42:02 PM	Helium MFC set to  0.000000
6/28/2012	12:42:02 PM	H2 MFC set to  0.000000
6/28/2012	12:42:02 PM	BCl3 MFC set to  0.000000
6/28/2012	12:42:02 PM	PH3 MFC set to  0.000000
6/28/2012	12:42:02 PM	SiCl4 MFC set to  0.000000
6/28/2012	12:42:02 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	12:42:02 PM	Tube furnace set to 0
6/28/2012	12:42:05 PM	H2 valve closed
6/28/2012	12:42:05 PM	BCl3 valve closed
6/28/2012	12:42:05 PM	PH3 valve closed
6/28/2012	12:42:05 PM	SiCl4 pre valve closed
6/28/2012	12:42:05 PM	SiCl4 post valve closed
6/28/2012	12:42:05 PM	Main Vac valve closed
6/28/2012	12:42:05 PM	Bypass valve closed
6/28/2012	12:42:05 PM	Bubbler valve closed
6/28/2012	12:42:05 PM	Helium valve opened
6/28/2012	12:42:05 PM	Helium MFC set to  500.000000
6/28/2012	12:42:05 PM	H2 MFC set to  0.000000
6/28/2012	12:42:05 PM	BCl3 MFC set to  0.000000
6/28/2012	12:42:05 PM	PH3 MFC set to  0.000000
6/28/2012	12:42:05 PM	SiCl4 MFC set to  0.000000
6/28/2012	12:42:05 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	12:42:05 PM	Tube furnace set to 0
6/28/2012	12:42:07 PM	Run aborted at 12:42 PM
6/28/2012	12:42:07 PM	Helium valve closed
6/28/2012	12:42:07 PM	H2 valve closed
6/28/2012	12:42:07 PM	BCl3 valve closed
6/28/2012	12:42:07 PM	PH3 valve closed
6/28/2012	12:42:07 PM	SiCl4 pre valve closed
6/28/2012	12:42:07 PM	SiCl4 post valve closed
6/28/2012	12:42:07 PM	Bypass valve closed
6/28/2012	12:42:07 PM	Main Vac valve closed
6/28/2012	12:42:07 PM	Bubbler valve closed
6/28/2012	12:42:07 PM	Helium MFC set to  0.000000
6/28/2012	12:42:07 PM	H2 MFC set to  0.000000
6/28/2012	12:42:07 PM	BCl3 MFC set to  0.000000
6/28/2012	12:42:07 PM	PH3 MFC set to  0.000000
6/28/2012	12:42:07 PM	SiCl4 MFC set to  0.000000
6/28/2012	12:42:07 PM	Tube furnace set to 0
6/28/2012	12:42:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2012	12:42:11 PM	SiCl4 post valve opened
6/28/2012	12:42:14 PM	Helium MFC set to  500.000000
6/28/2012	12:42:15 PM	Helium valve opened
6/28/2012	12:43:29 PM	Helium valve closed
6/28/2012	12:43:31 PM	Bypass valve opened
6/28/2012	12:44:34 PM	Main Vac valve opened
6/28/2012	12:44:35 PM	Bypass valve closed
6/28/2012	12:44:57 PM	Main Vac valve closed
6/28/2012	12:44:58 PM	Helium valve opened
6/28/2012	12:46:14 PM	Helium valve closed
6/28/2012	12:46:55 PM	SiCl4 post valve closed
6/28/2012	12:46:57 PM	SiCl4 post valve opened
6/28/2012	12:53:28 PM	Bypass valve opened
6/28/2012	12:53:33 PM	Bypass valve closed
6/28/2012	12:53:55 PM	Bypass valve opened
6/28/2012	12:56:11 PM	Main Vac valve opened
6/28/2012	12:56:11 PM	Bypass valve closed
6/28/2012	1:06:39 PM	Recipe started at 1:06 PM
6/28/2012	1:06:39 PM	Helium valve closed
6/28/2012	1:06:39 PM	H2 valve closed
6/28/2012	1:06:39 PM	BCl3 valve closed
6/28/2012	1:06:39 PM	PH3 valve closed
6/28/2012	1:06:39 PM	SiCl4 pre valve closed
6/28/2012	1:06:39 PM	SiCl4 post valve closed
6/28/2012	1:06:39 PM	Main Vac valve closed
6/28/2012	1:06:39 PM	Bypass valve closed
6/28/2012	1:06:39 PM	Bubbler valve closed
6/28/2012	1:06:39 PM	Helium MFC set to  0.000000
6/28/2012	1:06:39 PM	H2 MFC set to  0.000000
6/28/2012	1:06:39 PM	BCl3 MFC set to  0.000000
6/28/2012	1:06:39 PM	PH3 MFC set to  0.000000
6/28/2012	1:06:39 PM	SiCl4 MFC set to  0.000000
6/28/2012	1:06:39 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	1:06:39 PM	Tube furnace set to 0
6/28/2012	1:06:42 PM	H2 valve closed
6/28/2012	1:06:42 PM	BCl3 valve closed
6/28/2012	1:06:42 PM	PH3 valve closed
6/28/2012	1:06:42 PM	SiCl4 pre valve closed
6/28/2012	1:06:42 PM	Main Vac valve closed
6/28/2012	1:06:42 PM	Bypass valve closed
6/28/2012	1:06:42 PM	Bubbler valve closed
6/28/2012	1:06:42 PM	Helium valve opened
6/28/2012	1:06:42 PM	SiCl4 post valve opened
6/28/2012	1:06:42 PM	Helium MFC set to  500.000000
6/28/2012	1:06:42 PM	H2 MFC set to  0.000000
6/28/2012	1:06:42 PM	BCl3 MFC set to  0.000000
6/28/2012	1:06:42 PM	PH3 MFC set to  0.000000
6/28/2012	1:06:42 PM	SiCl4 MFC set to  0.000000
6/28/2012	1:06:42 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	1:06:43 PM	Tube furnace set to 0
6/28/2012	1:07:58 PM	Helium valve closed
6/28/2012	1:07:58 PM	H2 valve closed
6/28/2012	1:07:58 PM	BCl3 valve closed
6/28/2012	1:07:58 PM	PH3 valve closed
6/28/2012	1:07:58 PM	SiCl4 pre valve closed
6/28/2012	1:07:58 PM	Main Vac valve closed
6/28/2012	1:07:58 PM	Bypass valve closed
6/28/2012	1:07:58 PM	Bubbler valve closed
6/28/2012	1:07:58 PM	SiCl4 post valve opened
6/28/2012	1:07:58 PM	Helium MFC set to  0.000000
6/28/2012	1:07:58 PM	H2 MFC set to  0.000000
6/28/2012	1:07:58 PM	BCl3 MFC set to  0.000000
6/28/2012	1:07:58 PM	PH3 MFC set to  0.000000
6/28/2012	1:07:58 PM	SiCl4 MFC set to  0.000000
6/28/2012	1:07:58 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	1:07:58 PM	Tube furnace set to 0
6/28/2012	1:08:01 PM	Helium valve closed
6/28/2012	1:08:01 PM	H2 valve closed
6/28/2012	1:08:01 PM	BCl3 valve closed
6/28/2012	1:08:01 PM	PH3 valve closed
6/28/2012	1:08:01 PM	SiCl4 pre valve closed
6/28/2012	1:08:01 PM	Main Vac valve closed
6/28/2012	1:08:01 PM	Bubbler valve closed
6/28/2012	1:08:01 PM	SiCl4 post valve opened
6/28/2012	1:08:01 PM	Bypass valve opened
6/28/2012	1:08:01 PM	Helium MFC set to  0.000000
6/28/2012	1:08:01 PM	H2 MFC set to  0.000000
6/28/2012	1:08:01 PM	BCl3 MFC set to  0.000000
6/28/2012	1:08:01 PM	PH3 MFC set to  0.000000
6/28/2012	1:08:01 PM	SiCl4 MFC set to  0.000000
6/28/2012	1:08:01 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	1:08:02 PM	Tube furnace set to 0
6/28/2012	1:09:00 PM	Helium valve closed
6/28/2012	1:09:00 PM	H2 valve closed
6/28/2012	1:09:00 PM	BCl3 valve closed
6/28/2012	1:09:00 PM	PH3 valve closed
6/28/2012	1:09:00 PM	SiCl4 pre valve closed
6/28/2012	1:09:00 PM	Bypass valve closed
6/28/2012	1:09:00 PM	Bubbler valve closed
6/28/2012	1:09:00 PM	SiCl4 post valve opened
6/28/2012	1:09:00 PM	Main Vac valve opened
6/28/2012	1:09:00 PM	Helium MFC set to  0.000000
6/28/2012	1:09:00 PM	H2 MFC set to  0.000000
6/28/2012	1:09:00 PM	BCl3 MFC set to  0.000000
6/28/2012	1:09:00 PM	PH3 MFC set to  0.000000
6/28/2012	1:09:00 PM	SiCl4 MFC set to  0.000000
6/28/2012	1:09:00 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	1:09:00 PM	Tube furnace set to 0
6/28/2012	1:39:01 PM	Helium valve closed
6/28/2012	1:39:01 PM	H2 valve closed
6/28/2012	1:39:01 PM	BCl3 valve closed
6/28/2012	1:39:01 PM	PH3 valve closed
6/28/2012	1:39:01 PM	SiCl4 pre valve closed
6/28/2012	1:39:01 PM	Main Vac valve closed
6/28/2012	1:39:01 PM	Bypass valve closed
6/28/2012	1:39:01 PM	Bubbler valve closed
6/28/2012	1:39:01 PM	SiCl4 post valve opened
6/28/2012	1:39:01 PM	Helium MFC set to  0.000000
6/28/2012	1:39:01 PM	H2 MFC set to  0.000000
6/28/2012	1:39:01 PM	BCl3 MFC set to  0.000000
6/28/2012	1:39:01 PM	PH3 MFC set to  0.000000
6/28/2012	1:39:01 PM	SiCl4 MFC set to  0.000000
6/28/2012	1:39:01 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	1:39:01 PM	Tube furnace set to 0
6/28/2012	1:39:04 PM	H2 valve closed
6/28/2012	1:39:04 PM	BCl3 valve closed
6/28/2012	1:39:04 PM	PH3 valve closed
6/28/2012	1:39:04 PM	SiCl4 pre valve closed
6/28/2012	1:39:04 PM	Main Vac valve closed
6/28/2012	1:39:04 PM	Bypass valve closed
6/28/2012	1:39:04 PM	Bubbler valve closed
6/28/2012	1:39:04 PM	Helium valve opened
6/28/2012	1:39:04 PM	SiCl4 post valve opened
6/28/2012	1:39:04 PM	Helium MFC set to  500.000000
6/28/2012	1:39:04 PM	H2 MFC set to  0.000000
6/28/2012	1:39:04 PM	BCl3 MFC set to  0.000000
6/28/2012	1:39:04 PM	PH3 MFC set to  0.000000
6/28/2012	1:39:04 PM	SiCl4 MFC set to  0.000000
6/28/2012	1:39:04 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	1:39:04 PM	Tube furnace set to 0
6/28/2012	1:40:19 PM	Helium valve closed
6/28/2012	1:40:19 PM	H2 valve closed
6/28/2012	1:40:19 PM	BCl3 valve closed
6/28/2012	1:40:19 PM	PH3 valve closed
6/28/2012	1:40:19 PM	SiCl4 pre valve closed
6/28/2012	1:40:19 PM	Main Vac valve closed
6/28/2012	1:40:19 PM	Bypass valve closed
6/28/2012	1:40:19 PM	Bubbler valve closed
6/28/2012	1:40:19 PM	SiCl4 post valve opened
6/28/2012	1:40:19 PM	Helium MFC set to  0.000000
6/28/2012	1:40:19 PM	H2 MFC set to  0.000000
6/28/2012	1:40:19 PM	BCl3 MFC set to  0.000000
6/28/2012	1:40:19 PM	PH3 MFC set to  0.000000
6/28/2012	1:40:19 PM	SiCl4 MFC set to  0.000000
6/28/2012	1:40:19 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	1:40:20 PM	Tube furnace set to 0
6/28/2012	1:40:23 PM	Helium valve closed
6/28/2012	1:40:23 PM	H2 valve closed
6/28/2012	1:40:23 PM	BCl3 valve closed
6/28/2012	1:40:23 PM	PH3 valve closed
6/28/2012	1:40:23 PM	SiCl4 pre valve closed
6/28/2012	1:40:23 PM	Main Vac valve closed
6/28/2012	1:40:23 PM	Bubbler valve closed
6/28/2012	1:40:23 PM	SiCl4 post valve opened
6/28/2012	1:40:23 PM	Bypass valve opened
6/28/2012	1:40:23 PM	Helium MFC set to  0.000000
6/28/2012	1:40:23 PM	H2 MFC set to  0.000000
6/28/2012	1:40:23 PM	BCl3 MFC set to  0.000000
6/28/2012	1:40:23 PM	PH3 MFC set to  0.000000
6/28/2012	1:40:23 PM	SiCl4 MFC set to  0.000000
6/28/2012	1:40:23 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	1:40:23 PM	Tube furnace set to 0
6/28/2012	1:41:22 PM	Helium valve closed
6/28/2012	1:41:22 PM	H2 valve closed
6/28/2012	1:41:22 PM	BCl3 valve closed
6/28/2012	1:41:22 PM	PH3 valve closed
6/28/2012	1:41:22 PM	SiCl4 pre valve closed
6/28/2012	1:41:22 PM	Bypass valve closed
6/28/2012	1:41:22 PM	Bubbler valve closed
6/28/2012	1:41:22 PM	SiCl4 post valve opened
6/28/2012	1:41:22 PM	Main Vac valve opened
6/28/2012	1:41:22 PM	Helium MFC set to  0.000000
6/28/2012	1:41:22 PM	H2 MFC set to  0.000000
6/28/2012	1:41:22 PM	BCl3 MFC set to  0.000000
6/28/2012	1:41:22 PM	PH3 MFC set to  0.000000
6/28/2012	1:41:22 PM	SiCl4 MFC set to  0.000000
6/28/2012	1:41:22 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	1:41:23 PM	Tube furnace set to 0
6/28/2012	2:11:23 PM	Helium valve closed
6/28/2012	2:11:23 PM	H2 valve closed
6/28/2012	2:11:23 PM	BCl3 valve closed
6/28/2012	2:11:23 PM	PH3 valve closed
6/28/2012	2:11:23 PM	SiCl4 pre valve closed
6/28/2012	2:11:23 PM	Main Vac valve closed
6/28/2012	2:11:23 PM	Bypass valve closed
6/28/2012	2:11:23 PM	Bubbler valve closed
6/28/2012	2:11:23 PM	SiCl4 post valve opened
6/28/2012	2:11:23 PM	Helium MFC set to  0.000000
6/28/2012	2:11:23 PM	H2 MFC set to  0.000000
6/28/2012	2:11:23 PM	BCl3 MFC set to  0.000000
6/28/2012	2:11:23 PM	PH3 MFC set to  0.000000
6/28/2012	2:11:23 PM	SiCl4 MFC set to  0.000000
6/28/2012	2:11:23 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	2:11:23 PM	Tube furnace set to 0
6/28/2012	2:11:26 PM	H2 valve closed
6/28/2012	2:11:26 PM	BCl3 valve closed
6/28/2012	2:11:26 PM	PH3 valve closed
6/28/2012	2:11:26 PM	SiCl4 pre valve closed
6/28/2012	2:11:26 PM	Main Vac valve closed
6/28/2012	2:11:26 PM	Bypass valve closed
6/28/2012	2:11:26 PM	Bubbler valve closed
6/28/2012	2:11:26 PM	Helium valve opened
6/28/2012	2:11:26 PM	SiCl4 post valve opened
6/28/2012	2:11:26 PM	Helium MFC set to  500.000000
6/28/2012	2:11:26 PM	H2 MFC set to  0.000000
6/28/2012	2:11:26 PM	BCl3 MFC set to  0.000000
6/28/2012	2:11:26 PM	PH3 MFC set to  0.000000
6/28/2012	2:11:26 PM	SiCl4 MFC set to  0.000000
6/28/2012	2:11:26 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	2:11:26 PM	Tube furnace set to 0
6/28/2012	2:12:41 PM	Helium valve closed
6/28/2012	2:12:41 PM	H2 valve closed
6/28/2012	2:12:41 PM	BCl3 valve closed
6/28/2012	2:12:41 PM	PH3 valve closed
6/28/2012	2:12:41 PM	SiCl4 pre valve closed
6/28/2012	2:12:41 PM	Main Vac valve closed
6/28/2012	2:12:41 PM	Bypass valve closed
6/28/2012	2:12:41 PM	Bubbler valve closed
6/28/2012	2:12:41 PM	SiCl4 post valve opened
6/28/2012	2:12:41 PM	Helium MFC set to  0.000000
6/28/2012	2:12:41 PM	H2 MFC set to  0.000000
6/28/2012	2:12:41 PM	BCl3 MFC set to  0.000000
6/28/2012	2:12:41 PM	PH3 MFC set to  0.000000
6/28/2012	2:12:41 PM	SiCl4 MFC set to  0.000000
6/28/2012	2:12:41 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	2:12:42 PM	Tube furnace set to 0
6/28/2012	2:12:45 PM	Helium valve closed
6/28/2012	2:12:45 PM	H2 valve closed
6/28/2012	2:12:45 PM	BCl3 valve closed
6/28/2012	2:12:45 PM	PH3 valve closed
6/28/2012	2:12:45 PM	SiCl4 pre valve closed
6/28/2012	2:12:45 PM	Main Vac valve closed
6/28/2012	2:12:45 PM	Bubbler valve closed
6/28/2012	2:12:45 PM	SiCl4 post valve opened
6/28/2012	2:12:45 PM	Bypass valve opened
6/28/2012	2:12:45 PM	Helium MFC set to  0.000000
6/28/2012	2:12:45 PM	H2 MFC set to  0.000000
6/28/2012	2:12:45 PM	BCl3 MFC set to  0.000000
6/28/2012	2:12:45 PM	PH3 MFC set to  0.000000
6/28/2012	2:12:45 PM	SiCl4 MFC set to  0.000000
6/28/2012	2:12:45 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	2:12:45 PM	Tube furnace set to 0
6/28/2012	2:13:45 PM	Helium valve closed
6/28/2012	2:13:45 PM	H2 valve closed
6/28/2012	2:13:45 PM	BCl3 valve closed
6/28/2012	2:13:45 PM	PH3 valve closed
6/28/2012	2:13:45 PM	SiCl4 pre valve closed
6/28/2012	2:13:45 PM	Bypass valve closed
6/28/2012	2:13:45 PM	Bubbler valve closed
6/28/2012	2:13:45 PM	SiCl4 post valve opened
6/28/2012	2:13:45 PM	Main Vac valve opened
6/28/2012	2:13:45 PM	Helium MFC set to  0.000000
6/28/2012	2:13:45 PM	H2 MFC set to  0.000000
6/28/2012	2:13:45 PM	BCl3 MFC set to  0.000000
6/28/2012	2:13:45 PM	PH3 MFC set to  0.000000
6/28/2012	2:13:45 PM	SiCl4 MFC set to  0.000000
6/28/2012	2:13:45 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	2:13:45 PM	Tube furnace set to 0
6/28/2012	2:13:46 PM	Run finished at 2:13 PM
6/28/2012	2:43:34 PM	Recipe started at 2:43 PM
6/28/2012	2:43:34 PM	Helium valve closed
6/28/2012	2:43:34 PM	H2 valve closed
6/28/2012	2:43:34 PM	BCl3 valve closed
6/28/2012	2:43:34 PM	PH3 valve closed
6/28/2012	2:43:34 PM	SiCl4 pre valve closed
6/28/2012	2:43:34 PM	SiCl4 post valve closed
6/28/2012	2:43:34 PM	Main Vac valve closed
6/28/2012	2:43:34 PM	Bypass valve closed
6/28/2012	2:43:34 PM	Bubbler valve closed
6/28/2012	2:43:34 PM	Helium MFC set to  0.000000
6/28/2012	2:43:35 PM	H2 MFC set to  0.000000
6/28/2012	2:43:35 PM	BCl3 MFC set to  0.000000
6/28/2012	2:43:35 PM	PH3 MFC set to  0.000000
6/28/2012	2:43:35 PM	SiCl4 MFC set to  0.000000
6/28/2012	2:43:35 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	2:43:35 PM	Tube furnace set to 0
6/28/2012	2:43:38 PM	H2 valve closed
6/28/2012	2:43:38 PM	BCl3 valve closed
6/28/2012	2:43:38 PM	PH3 valve closed
6/28/2012	2:43:38 PM	SiCl4 pre valve closed
6/28/2012	2:43:38 PM	Main Vac valve closed
6/28/2012	2:43:38 PM	Bypass valve closed
6/28/2012	2:43:38 PM	Bubbler valve closed
6/28/2012	2:43:38 PM	Helium valve opened
6/28/2012	2:43:38 PM	SiCl4 post valve opened
6/28/2012	2:43:38 PM	Helium MFC set to  500.000000
6/28/2012	2:43:38 PM	H2 MFC set to  0.000000
6/28/2012	2:43:38 PM	BCl3 MFC set to  0.000000
6/28/2012	2:43:38 PM	PH3 MFC set to  0.000000
6/28/2012	2:43:38 PM	SiCl4 MFC set to  0.000000
6/28/2012	2:43:38 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	2:43:38 PM	Tube furnace set to 0
6/28/2012	2:44:53 PM	Helium valve closed
6/28/2012	2:44:53 PM	H2 valve closed
6/28/2012	2:44:53 PM	BCl3 valve closed
6/28/2012	2:44:53 PM	PH3 valve closed
6/28/2012	2:44:53 PM	SiCl4 pre valve closed
6/28/2012	2:44:53 PM	Main Vac valve closed
6/28/2012	2:44:53 PM	Bypass valve closed
6/28/2012	2:44:53 PM	Bubbler valve closed
6/28/2012	2:44:53 PM	SiCl4 post valve opened
6/28/2012	2:44:53 PM	Helium MFC set to  0.000000
6/28/2012	2:44:53 PM	H2 MFC set to  0.000000
6/28/2012	2:44:53 PM	BCl3 MFC set to  0.000000
6/28/2012	2:44:53 PM	PH3 MFC set to  0.000000
6/28/2012	2:44:53 PM	SiCl4 MFC set to  0.000000
6/28/2012	2:44:53 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	2:44:54 PM	Tube furnace set to 0
6/28/2012	2:44:57 PM	Helium valve closed
6/28/2012	2:44:57 PM	H2 valve closed
6/28/2012	2:44:57 PM	BCl3 valve closed
6/28/2012	2:44:57 PM	PH3 valve closed
6/28/2012	2:44:57 PM	SiCl4 pre valve closed
6/28/2012	2:44:57 PM	Main Vac valve closed
6/28/2012	2:44:57 PM	Bubbler valve closed
6/28/2012	2:44:57 PM	SiCl4 post valve opened
6/28/2012	2:44:57 PM	Bypass valve opened
6/28/2012	2:44:57 PM	Helium MFC set to  0.000000
6/28/2012	2:44:57 PM	H2 MFC set to  0.000000
6/28/2012	2:44:57 PM	BCl3 MFC set to  0.000000
6/28/2012	2:44:57 PM	PH3 MFC set to  0.000000
6/28/2012	2:44:57 PM	SiCl4 MFC set to  0.000000
6/28/2012	2:44:57 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	2:44:57 PM	Tube furnace set to 0
6/28/2012	2:45:57 PM	Helium valve closed
6/28/2012	2:45:57 PM	H2 valve closed
6/28/2012	2:45:57 PM	BCl3 valve closed
6/28/2012	2:45:57 PM	PH3 valve closed
6/28/2012	2:45:57 PM	SiCl4 pre valve closed
6/28/2012	2:45:57 PM	Bypass valve closed
6/28/2012	2:45:57 PM	Bubbler valve closed
6/28/2012	2:45:57 PM	SiCl4 post valve opened
6/28/2012	2:45:57 PM	Main Vac valve opened
6/28/2012	2:45:57 PM	Helium MFC set to  0.000000
6/28/2012	2:45:57 PM	H2 MFC set to  0.000000
6/28/2012	2:45:57 PM	BCl3 MFC set to  0.000000
6/28/2012	2:45:57 PM	PH3 MFC set to  0.000000
6/28/2012	2:45:57 PM	SiCl4 MFC set to  0.000000
6/28/2012	2:45:57 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	2:45:57 PM	Tube furnace set to 0
6/28/2012	3:15:57 PM	Helium valve closed
6/28/2012	3:15:57 PM	H2 valve closed
6/28/2012	3:15:57 PM	BCl3 valve closed
6/28/2012	3:15:57 PM	PH3 valve closed
6/28/2012	3:15:57 PM	SiCl4 pre valve closed
6/28/2012	3:15:57 PM	Main Vac valve closed
6/28/2012	3:15:57 PM	Bypass valve closed
6/28/2012	3:15:57 PM	Bubbler valve closed
6/28/2012	3:15:57 PM	SiCl4 post valve opened
6/28/2012	3:15:57 PM	Helium MFC set to  0.000000
6/28/2012	3:15:57 PM	H2 MFC set to  0.000000
6/28/2012	3:15:57 PM	BCl3 MFC set to  0.000000
6/28/2012	3:15:57 PM	PH3 MFC set to  0.000000
6/28/2012	3:15:57 PM	SiCl4 MFC set to  0.000000
6/28/2012	3:15:57 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	3:15:57 PM	Tube furnace set to 0
6/28/2012	3:16:00 PM	H2 valve closed
6/28/2012	3:16:00 PM	BCl3 valve closed
6/28/2012	3:16:00 PM	PH3 valve closed
6/28/2012	3:16:00 PM	SiCl4 pre valve closed
6/28/2012	3:16:00 PM	Main Vac valve closed
6/28/2012	3:16:00 PM	Bypass valve closed
6/28/2012	3:16:00 PM	Bubbler valve closed
6/28/2012	3:16:00 PM	Helium valve opened
6/28/2012	3:16:00 PM	SiCl4 post valve opened
6/28/2012	3:16:00 PM	Helium MFC set to  500.000000
6/28/2012	3:16:00 PM	H2 MFC set to  0.000000
6/28/2012	3:16:00 PM	BCl3 MFC set to  0.000000
6/28/2012	3:16:00 PM	PH3 MFC set to  0.000000
6/28/2012	3:16:00 PM	SiCl4 MFC set to  0.000000
6/28/2012	3:16:00 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	3:16:00 PM	Tube furnace set to 0
6/28/2012	3:17:16 PM	Helium valve closed
6/28/2012	3:17:16 PM	H2 valve closed
6/28/2012	3:17:16 PM	BCl3 valve closed
6/28/2012	3:17:16 PM	PH3 valve closed
6/28/2012	3:17:16 PM	SiCl4 pre valve closed
6/28/2012	3:17:16 PM	Main Vac valve closed
6/28/2012	3:17:16 PM	Bypass valve closed
6/28/2012	3:17:16 PM	Bubbler valve closed
6/28/2012	3:17:16 PM	SiCl4 post valve opened
6/28/2012	3:17:16 PM	Helium MFC set to  0.000000
6/28/2012	3:17:16 PM	H2 MFC set to  0.000000
6/28/2012	3:17:16 PM	BCl3 MFC set to  0.000000
6/28/2012	3:17:16 PM	PH3 MFC set to  0.000000
6/28/2012	3:17:16 PM	SiCl4 MFC set to  0.000000
6/28/2012	3:17:16 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	3:17:16 PM	Tube furnace set to 0
6/28/2012	3:17:19 PM	Helium valve closed
6/28/2012	3:17:19 PM	H2 valve closed
6/28/2012	3:17:19 PM	BCl3 valve closed
6/28/2012	3:17:19 PM	PH3 valve closed
6/28/2012	3:17:19 PM	SiCl4 pre valve closed
6/28/2012	3:17:19 PM	Main Vac valve closed
6/28/2012	3:17:19 PM	Bubbler valve closed
6/28/2012	3:17:19 PM	SiCl4 post valve opened
6/28/2012	3:17:19 PM	Bypass valve opened
6/28/2012	3:17:19 PM	Helium MFC set to  0.000000
6/28/2012	3:17:19 PM	H2 MFC set to  0.000000
6/28/2012	3:17:19 PM	BCl3 MFC set to  0.000000
6/28/2012	3:17:19 PM	PH3 MFC set to  0.000000
6/28/2012	3:17:19 PM	SiCl4 MFC set to  0.000000
6/28/2012	3:17:19 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	3:17:19 PM	Tube furnace set to 0
6/28/2012	3:18:18 PM	Helium valve closed
6/28/2012	3:18:18 PM	H2 valve closed
6/28/2012	3:18:18 PM	BCl3 valve closed
6/28/2012	3:18:18 PM	PH3 valve closed
6/28/2012	3:18:18 PM	SiCl4 pre valve closed
6/28/2012	3:18:18 PM	Bypass valve closed
6/28/2012	3:18:19 PM	Bubbler valve closed
6/28/2012	3:18:19 PM	SiCl4 post valve opened
6/28/2012	3:18:19 PM	Main Vac valve opened
6/28/2012	3:18:19 PM	Helium MFC set to  0.000000
6/28/2012	3:18:19 PM	H2 MFC set to  0.000000
6/28/2012	3:18:19 PM	BCl3 MFC set to  0.000000
6/28/2012	3:18:19 PM	PH3 MFC set to  0.000000
6/28/2012	3:18:19 PM	SiCl4 MFC set to  0.000000
6/28/2012	3:18:19 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	3:18:19 PM	Tube furnace set to 0
6/28/2012	3:48:19 PM	Helium valve closed
6/28/2012	3:48:19 PM	H2 valve closed
6/28/2012	3:48:19 PM	BCl3 valve closed
6/28/2012	3:48:19 PM	PH3 valve closed
6/28/2012	3:48:19 PM	SiCl4 pre valve closed
6/28/2012	3:48:19 PM	Main Vac valve closed
6/28/2012	3:48:19 PM	Bypass valve closed
6/28/2012	3:48:19 PM	Bubbler valve closed
6/28/2012	3:48:19 PM	SiCl4 post valve opened
6/28/2012	3:48:19 PM	Helium MFC set to  0.000000
6/28/2012	3:48:19 PM	H2 MFC set to  0.000000
6/28/2012	3:48:19 PM	BCl3 MFC set to  0.000000
6/28/2012	3:48:19 PM	PH3 MFC set to  0.000000
6/28/2012	3:48:19 PM	SiCl4 MFC set to  0.000000
6/28/2012	3:48:19 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	3:48:19 PM	Tube furnace set to 0
6/28/2012	3:48:22 PM	H2 valve closed
6/28/2012	3:48:22 PM	BCl3 valve closed
6/28/2012	3:48:22 PM	PH3 valve closed
6/28/2012	3:48:22 PM	SiCl4 pre valve closed
6/28/2012	3:48:22 PM	Main Vac valve closed
6/28/2012	3:48:22 PM	Bypass valve closed
6/28/2012	3:48:22 PM	Bubbler valve closed
6/28/2012	3:48:22 PM	Helium valve opened
6/28/2012	3:48:22 PM	SiCl4 post valve opened
6/28/2012	3:48:22 PM	Helium MFC set to  500.000000
6/28/2012	3:48:22 PM	H2 MFC set to  0.000000
6/28/2012	3:48:22 PM	BCl3 MFC set to  0.000000
6/28/2012	3:48:22 PM	PH3 MFC set to  0.000000
6/28/2012	3:48:22 PM	SiCl4 MFC set to  0.000000
6/28/2012	3:48:22 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	3:48:22 PM	Tube furnace set to 0
6/28/2012	3:49:38 PM	Helium valve closed
6/28/2012	3:49:38 PM	H2 valve closed
6/28/2012	3:49:38 PM	BCl3 valve closed
6/28/2012	3:49:38 PM	PH3 valve closed
6/28/2012	3:49:38 PM	SiCl4 pre valve closed
6/28/2012	3:49:38 PM	Main Vac valve closed
6/28/2012	3:49:38 PM	Bypass valve closed
6/28/2012	3:49:38 PM	Bubbler valve closed
6/28/2012	3:49:38 PM	SiCl4 post valve opened
6/28/2012	3:49:38 PM	Helium MFC set to  0.000000
6/28/2012	3:49:38 PM	H2 MFC set to  0.000000
6/28/2012	3:49:38 PM	BCl3 MFC set to  0.000000
6/28/2012	3:49:38 PM	PH3 MFC set to  0.000000
6/28/2012	3:49:38 PM	SiCl4 MFC set to  0.000000
6/28/2012	3:49:38 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	3:49:38 PM	Tube furnace set to 0
6/28/2012	3:49:41 PM	Helium valve closed
6/28/2012	3:49:41 PM	H2 valve closed
6/28/2012	3:49:41 PM	BCl3 valve closed
6/28/2012	3:49:41 PM	PH3 valve closed
6/28/2012	3:49:41 PM	SiCl4 pre valve closed
6/28/2012	3:49:41 PM	Main Vac valve closed
6/28/2012	3:49:41 PM	Bubbler valve closed
6/28/2012	3:49:41 PM	SiCl4 post valve opened
6/28/2012	3:49:41 PM	Bypass valve opened
6/28/2012	3:49:41 PM	Helium MFC set to  0.000000
6/28/2012	3:49:41 PM	H2 MFC set to  0.000000
6/28/2012	3:49:41 PM	BCl3 MFC set to  0.000000
6/28/2012	3:49:41 PM	PH3 MFC set to  0.000000
6/28/2012	3:49:41 PM	SiCl4 MFC set to  0.000000
6/28/2012	3:49:41 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	3:49:41 PM	Tube furnace set to 0
6/28/2012	3:50:41 PM	Helium valve closed
6/28/2012	3:50:41 PM	H2 valve closed
6/28/2012	3:50:41 PM	BCl3 valve closed
6/28/2012	3:50:41 PM	PH3 valve closed
6/28/2012	3:50:41 PM	SiCl4 pre valve closed
6/28/2012	3:50:41 PM	Bypass valve closed
6/28/2012	3:50:41 PM	Bubbler valve closed
6/28/2012	3:50:41 PM	SiCl4 post valve opened
6/28/2012	3:50:41 PM	Main Vac valve opened
6/28/2012	3:50:41 PM	Helium MFC set to  0.000000
6/28/2012	3:50:41 PM	H2 MFC set to  0.000000
6/28/2012	3:50:41 PM	BCl3 MFC set to  0.000000
6/28/2012	3:50:41 PM	PH3 MFC set to  0.000000
6/28/2012	3:50:41 PM	SiCl4 MFC set to  0.000000
6/28/2012	3:50:41 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	3:50:41 PM	Tube furnace set to 0
6/28/2012	3:50:42 PM	Run finished at 3:50 PM
6/28/2012	5:20:32 PM	SiCl4 post valve closed
6/28/2012	5:20:48 PM	SiCl4 post valve opened
6/28/2012	5:20:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2012	5:20:50 PM	Recipe started at 5:20 PM
6/28/2012	5:20:50 PM	Helium valve closed
6/28/2012	5:20:50 PM	H2 valve closed
6/28/2012	5:20:50 PM	BCl3 valve closed
6/28/2012	5:20:50 PM	PH3 valve closed
6/28/2012	5:20:50 PM	SiCl4 pre valve closed
6/28/2012	5:20:50 PM	SiCl4 post valve closed
6/28/2012	5:20:50 PM	Main Vac valve closed
6/28/2012	5:20:50 PM	Bypass valve closed
6/28/2012	5:20:50 PM	Bubbler valve closed
6/28/2012	5:20:50 PM	Helium MFC set to  0.000000
6/28/2012	5:20:50 PM	H2 MFC set to  0.000000
6/28/2012	5:20:50 PM	BCl3 MFC set to  0.000000
6/28/2012	5:20:50 PM	PH3 MFC set to  0.000000
6/28/2012	5:20:50 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:20:50 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:20:51 PM	Tube furnace set to 0
6/28/2012	5:20:54 PM	H2 valve closed
6/28/2012	5:20:54 PM	BCl3 valve closed
6/28/2012	5:20:54 PM	PH3 valve closed
6/28/2012	5:20:54 PM	SiCl4 pre valve closed
6/28/2012	5:20:54 PM	SiCl4 post valve closed
6/28/2012	5:20:54 PM	Main Vac valve closed
6/28/2012	5:20:54 PM	Bypass valve closed
6/28/2012	5:20:54 PM	Bubbler valve closed
6/28/2012	5:20:54 PM	Helium valve opened
6/28/2012	5:20:54 PM	Helium MFC set to  500.000000
6/28/2012	5:20:54 PM	H2 MFC set to  0.000000
6/28/2012	5:20:54 PM	BCl3 MFC set to  0.000000
6/28/2012	5:20:54 PM	PH3 MFC set to  0.000000
6/28/2012	5:20:54 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:20:54 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:20:54 PM	Tube furnace set to 0
6/28/2012	5:22:07 PM	Helium valve closed
6/28/2012	5:22:07 PM	H2 valve closed
6/28/2012	5:22:07 PM	BCl3 valve closed
6/28/2012	5:22:07 PM	PH3 valve closed
6/28/2012	5:22:07 PM	SiCl4 pre valve closed
6/28/2012	5:22:07 PM	SiCl4 post valve closed
6/28/2012	5:22:07 PM	Main Vac valve closed
6/28/2012	5:22:07 PM	Bypass valve closed
6/28/2012	5:22:07 PM	Bubbler valve closed
6/28/2012	5:22:07 PM	Helium MFC set to  0.000000
6/28/2012	5:22:07 PM	H2 MFC set to  0.000000
6/28/2012	5:22:07 PM	BCl3 MFC set to  0.000000
6/28/2012	5:22:07 PM	PH3 MFC set to  0.000000
6/28/2012	5:22:07 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:22:07 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:22:07 PM	Tube furnace set to 0
6/28/2012	5:22:08 PM	Run finished at 5:22 PM
6/28/2012	5:22:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2012	5:30:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2012	5:30:31 PM	Recipe started at 5:30 PM
6/28/2012	5:30:31 PM	Helium valve closed
6/28/2012	5:30:31 PM	H2 valve closed
6/28/2012	5:30:31 PM	BCl3 valve closed
6/28/2012	5:30:31 PM	PH3 valve closed
6/28/2012	5:30:31 PM	SiCl4 pre valve closed
6/28/2012	5:30:31 PM	SiCl4 post valve closed
6/28/2012	5:30:31 PM	Main Vac valve closed
6/28/2012	5:30:31 PM	Bubbler valve closed
6/28/2012	5:30:31 PM	Bypass valve opened
6/28/2012	5:30:31 PM	Helium MFC set to  0.000000
6/28/2012	5:30:31 PM	H2 MFC set to  0.000000
6/28/2012	5:30:31 PM	BCl3 MFC set to  0.000000
6/28/2012	5:30:31 PM	PH3 MFC set to  0.000000
6/28/2012	5:30:31 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:30:31 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:30:31 PM	Tube furnace set to 0
6/28/2012	5:31:40 PM	Helium valve closed
6/28/2012	5:31:40 PM	H2 valve closed
6/28/2012	5:31:40 PM	BCl3 valve closed
6/28/2012	5:31:40 PM	PH3 valve closed
6/28/2012	5:31:40 PM	SiCl4 pre valve closed
6/28/2012	5:31:40 PM	SiCl4 post valve closed
6/28/2012	5:31:40 PM	Main Vac valve closed
6/28/2012	5:31:40 PM	Bubbler valve closed
6/28/2012	5:31:40 PM	Bypass valve opened
6/28/2012	5:31:40 PM	Helium MFC set to  0.000000
6/28/2012	5:31:40 PM	H2 MFC set to  0.000000
6/28/2012	5:31:40 PM	BCl3 MFC set to  0.000000
6/28/2012	5:31:40 PM	PH3 MFC set to  0.000000
6/28/2012	5:31:40 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:31:40 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:31:40 PM	Tube furnace set to 0
6/28/2012	5:31:51 PM	Helium valve closed
6/28/2012	5:31:51 PM	H2 valve closed
6/28/2012	5:31:51 PM	BCl3 valve closed
6/28/2012	5:31:51 PM	PH3 valve closed
6/28/2012	5:31:51 PM	SiCl4 pre valve closed
6/28/2012	5:31:51 PM	SiCl4 post valve closed
6/28/2012	5:31:51 PM	Bypass valve closed
6/28/2012	5:31:51 PM	Bubbler valve closed
6/28/2012	5:31:51 PM	Main Vac valve opened
6/28/2012	5:31:51 PM	Helium MFC set to  0.000000
6/28/2012	5:31:51 PM	H2 MFC set to  0.000000
6/28/2012	5:31:51 PM	BCl3 MFC set to  0.000000
6/28/2012	5:31:51 PM	PH3 MFC set to  0.000000
6/28/2012	5:31:51 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:31:51 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:31:51 PM	Tube furnace set to 0
6/28/2012	5:31:52 PM	Run finished at 5:31 PM
6/28/2012	5:31:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2012	5:49:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/28/2012	5:49:25 PM	Recipe started at 5:49 PM
6/28/2012	5:49:25 PM	Helium valve closed
6/28/2012	5:49:25 PM	H2 valve closed
6/28/2012	5:49:25 PM	BCl3 valve closed
6/28/2012	5:49:25 PM	PH3 valve closed
6/28/2012	5:49:25 PM	SiCl4 pre valve closed
6/28/2012	5:49:25 PM	SiCl4 post valve closed
6/28/2012	5:49:25 PM	Main Vac valve closed
6/28/2012	5:49:25 PM	Bubbler valve closed
6/28/2012	5:49:25 PM	Bypass valve opened
6/28/2012	5:49:25 PM	Helium MFC set to  0.000000
6/28/2012	5:49:25 PM	H2 MFC set to  0.000000
6/28/2012	5:49:25 PM	BCl3 MFC set to  0.000000
6/28/2012	5:49:25 PM	PH3 MFC set to  0.000000
6/28/2012	5:49:25 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:49:25 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:49:25 PM	Tube furnace set to 0
6/28/2012	5:49:25 PM	Helium valve closed
6/28/2012	5:49:26 PM	H2 valve closed
6/28/2012	5:49:26 PM	BCl3 valve closed
6/28/2012	5:49:26 PM	PH3 valve closed
6/28/2012	5:49:26 PM	SiCl4 pre valve closed
6/28/2012	5:49:26 PM	SiCl4 post valve closed
6/28/2012	5:49:26 PM	Main Vac valve closed
6/28/2012	5:49:26 PM	Bubbler valve closed
6/28/2012	5:49:26 PM	Bypass valve opened
6/28/2012	5:49:26 PM	Helium MFC set to  0.000000
6/28/2012	5:49:26 PM	H2 MFC set to  0.000000
6/28/2012	5:49:26 PM	BCl3 MFC set to  0.000000
6/28/2012	5:49:26 PM	PH3 MFC set to  0.000000
6/28/2012	5:49:26 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:49:26 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:49:26 PM	Tube furnace set to 0
6/28/2012	5:49:31 PM	Helium valve closed
6/28/2012	5:49:31 PM	H2 valve closed
6/28/2012	5:49:31 PM	BCl3 valve closed
6/28/2012	5:49:31 PM	PH3 valve closed
6/28/2012	5:49:31 PM	SiCl4 pre valve closed
6/28/2012	5:49:31 PM	SiCl4 post valve closed
6/28/2012	5:49:31 PM	Bypass valve closed
6/28/2012	5:49:31 PM	Bubbler valve closed
6/28/2012	5:49:31 PM	Main Vac valve opened
6/28/2012	5:49:31 PM	Helium MFC set to  0.000000
6/28/2012	5:49:31 PM	H2 MFC set to  0.000000
6/28/2012	5:49:31 PM	BCl3 MFC set to  0.000000
6/28/2012	5:49:31 PM	PH3 MFC set to  0.000000
6/28/2012	5:49:31 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:49:31 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:49:31 PM	Tube furnace set to 0
6/28/2012	5:49:31 PM	H2 valve closed
6/28/2012	5:49:31 PM	BCl3 valve closed
6/28/2012	5:49:31 PM	PH3 valve closed
6/28/2012	5:49:31 PM	SiCl4 pre valve closed
6/28/2012	5:49:31 PM	SiCl4 post valve closed
6/28/2012	5:49:31 PM	Bypass valve closed
6/28/2012	5:49:32 PM	Bubbler valve closed
6/28/2012	5:49:32 PM	Helium valve opened
6/28/2012	5:49:32 PM	Main Vac valve opened
6/28/2012	5:49:32 PM	Helium MFC set to  20.000000
6/28/2012	5:49:32 PM	H2 MFC set to  0.000000
6/28/2012	5:49:32 PM	BCl3 MFC set to  0.000000
6/28/2012	5:49:32 PM	PH3 MFC set to  0.000000
6/28/2012	5:49:32 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:49:32 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:49:32 PM	Tube furnace set to 0
6/28/2012	5:50:02 PM	Helium valve closed
6/28/2012	5:50:02 PM	H2 valve closed
6/28/2012	5:50:02 PM	BCl3 valve closed
6/28/2012	5:50:02 PM	PH3 valve closed
6/28/2012	5:50:02 PM	SiCl4 pre valve closed
6/28/2012	5:50:02 PM	SiCl4 post valve closed
6/28/2012	5:50:02 PM	Bypass valve closed
6/28/2012	5:50:02 PM	Bubbler valve closed
6/28/2012	5:50:02 PM	Main Vac valve opened
6/28/2012	5:50:02 PM	Helium MFC set to  0.000000
6/28/2012	5:50:02 PM	H2 MFC set to  0.000000
6/28/2012	5:50:02 PM	BCl3 MFC set to  0.000000
6/28/2012	5:50:02 PM	PH3 MFC set to  0.000000
6/28/2012	5:50:02 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:50:02 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:50:02 PM	Tube furnace set to 0
6/28/2012	5:50:32 PM	H2 valve closed
6/28/2012	5:50:32 PM	BCl3 valve closed
6/28/2012	5:50:32 PM	PH3 valve closed
6/28/2012	5:50:32 PM	SiCl4 pre valve closed
6/28/2012	5:50:32 PM	SiCl4 post valve closed
6/28/2012	5:50:32 PM	Bypass valve closed
6/28/2012	5:50:32 PM	Bubbler valve closed
6/28/2012	5:50:32 PM	Helium valve opened
6/28/2012	5:50:32 PM	Main Vac valve opened
6/28/2012	5:50:32 PM	Helium MFC set to  20.000000
6/28/2012	5:50:32 PM	H2 MFC set to  0.000000
6/28/2012	5:50:32 PM	BCl3 MFC set to  0.000000
6/28/2012	5:50:32 PM	PH3 MFC set to  0.000000
6/28/2012	5:50:32 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:50:32 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:50:32 PM	Tube furnace set to 0
6/28/2012	5:51:02 PM	Helium valve closed
6/28/2012	5:51:02 PM	H2 valve closed
6/28/2012	5:51:02 PM	BCl3 valve closed
6/28/2012	5:51:02 PM	PH3 valve closed
6/28/2012	5:51:02 PM	SiCl4 pre valve closed
6/28/2012	5:51:02 PM	SiCl4 post valve closed
6/28/2012	5:51:02 PM	Bypass valve closed
6/28/2012	5:51:02 PM	Bubbler valve closed
6/28/2012	5:51:02 PM	Main Vac valve opened
6/28/2012	5:51:02 PM	Helium MFC set to  0.000000
6/28/2012	5:51:02 PM	H2 MFC set to  0.000000
6/28/2012	5:51:02 PM	BCl3 MFC set to  0.000000
6/28/2012	5:51:02 PM	PH3 MFC set to  0.000000
6/28/2012	5:51:02 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:51:02 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:51:02 PM	Tube furnace set to 0
6/28/2012	5:51:32 PM	H2 valve closed
6/28/2012	5:51:32 PM	BCl3 valve closed
6/28/2012	5:51:32 PM	PH3 valve closed
6/28/2012	5:51:32 PM	SiCl4 pre valve closed
6/28/2012	5:51:32 PM	SiCl4 post valve closed
6/28/2012	5:51:32 PM	Bypass valve closed
6/28/2012	5:51:32 PM	Bubbler valve closed
6/28/2012	5:51:32 PM	Helium valve opened
6/28/2012	5:51:32 PM	Main Vac valve opened
6/28/2012	5:51:32 PM	Helium MFC set to  20.000000
6/28/2012	5:51:32 PM	H2 MFC set to  0.000000
6/28/2012	5:51:32 PM	BCl3 MFC set to  0.000000
6/28/2012	5:51:32 PM	PH3 MFC set to  0.000000
6/28/2012	5:51:32 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:51:32 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:51:33 PM	Tube furnace set to 0
6/28/2012	5:52:03 PM	Helium valve closed
6/28/2012	5:52:03 PM	H2 valve closed
6/28/2012	5:52:03 PM	BCl3 valve closed
6/28/2012	5:52:03 PM	PH3 valve closed
6/28/2012	5:52:03 PM	SiCl4 pre valve closed
6/28/2012	5:52:03 PM	SiCl4 post valve closed
6/28/2012	5:52:03 PM	Bypass valve closed
6/28/2012	5:52:03 PM	Bubbler valve closed
6/28/2012	5:52:03 PM	Main Vac valve opened
6/28/2012	5:52:03 PM	Helium MFC set to  0.000000
6/28/2012	5:52:03 PM	H2 MFC set to  0.000000
6/28/2012	5:52:03 PM	BCl3 MFC set to  0.000000
6/28/2012	5:52:03 PM	PH3 MFC set to  0.000000
6/28/2012	5:52:03 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:52:03 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:52:03 PM	Tube furnace set to 0
6/28/2012	5:52:33 PM	H2 valve closed
6/28/2012	5:52:33 PM	BCl3 valve closed
6/28/2012	5:52:33 PM	PH3 valve closed
6/28/2012	5:52:33 PM	SiCl4 pre valve closed
6/28/2012	5:52:33 PM	SiCl4 post valve closed
6/28/2012	5:52:33 PM	Bypass valve closed
6/28/2012	5:52:33 PM	Bubbler valve closed
6/28/2012	5:52:33 PM	Helium valve opened
6/28/2012	5:52:33 PM	Main Vac valve opened
6/28/2012	5:52:33 PM	Helium MFC set to  20.000000
6/28/2012	5:52:33 PM	H2 MFC set to  0.000000
6/28/2012	5:52:33 PM	BCl3 MFC set to  0.000000
6/28/2012	5:52:33 PM	PH3 MFC set to  0.000000
6/28/2012	5:52:33 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:52:33 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:52:33 PM	Tube furnace set to 0
6/28/2012	5:53:03 PM	Helium valve closed
6/28/2012	5:53:03 PM	H2 valve closed
6/28/2012	5:53:03 PM	BCl3 valve closed
6/28/2012	5:53:03 PM	PH3 valve closed
6/28/2012	5:53:03 PM	SiCl4 pre valve closed
6/28/2012	5:53:03 PM	SiCl4 post valve closed
6/28/2012	5:53:03 PM	Bypass valve closed
6/28/2012	5:53:03 PM	Bubbler valve closed
6/28/2012	5:53:03 PM	Main Vac valve opened
6/28/2012	5:53:03 PM	Helium MFC set to  0.000000
6/28/2012	5:53:03 PM	H2 MFC set to  0.000000
6/28/2012	5:53:03 PM	BCl3 MFC set to  0.000000
6/28/2012	5:53:03 PM	PH3 MFC set to  0.000000
6/28/2012	5:53:03 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:53:03 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:53:03 PM	Tube furnace set to 0
6/28/2012	5:53:33 PM	H2 valve closed
6/28/2012	5:53:33 PM	BCl3 valve closed
6/28/2012	5:53:33 PM	PH3 valve closed
6/28/2012	5:53:33 PM	SiCl4 pre valve closed
6/28/2012	5:53:33 PM	SiCl4 post valve closed
6/28/2012	5:53:33 PM	Bypass valve closed
6/28/2012	5:53:33 PM	Bubbler valve closed
6/28/2012	5:53:33 PM	Helium valve opened
6/28/2012	5:53:33 PM	Main Vac valve opened
6/28/2012	5:53:33 PM	Helium MFC set to  20.000000
6/28/2012	5:53:33 PM	H2 MFC set to  0.000000
6/28/2012	5:53:33 PM	BCl3 MFC set to  0.000000
6/28/2012	5:53:33 PM	PH3 MFC set to  0.000000
6/28/2012	5:53:33 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:53:33 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:53:34 PM	Tube furnace set to 0
6/28/2012	5:54:04 PM	Helium valve closed
6/28/2012	5:54:04 PM	H2 valve closed
6/28/2012	5:54:04 PM	BCl3 valve closed
6/28/2012	5:54:04 PM	PH3 valve closed
6/28/2012	5:54:04 PM	SiCl4 pre valve closed
6/28/2012	5:54:04 PM	SiCl4 post valve closed
6/28/2012	5:54:04 PM	Bypass valve closed
6/28/2012	5:54:04 PM	Bubbler valve closed
6/28/2012	5:54:04 PM	Main Vac valve opened
6/28/2012	5:54:04 PM	Helium MFC set to  0.000000
6/28/2012	5:54:04 PM	H2 MFC set to  0.000000
6/28/2012	5:54:04 PM	BCl3 MFC set to  0.000000
6/28/2012	5:54:04 PM	PH3 MFC set to  0.000000
6/28/2012	5:54:04 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:54:04 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:54:04 PM	Tube furnace set to 0
6/28/2012	5:54:34 PM	H2 valve closed
6/28/2012	5:54:34 PM	BCl3 valve closed
6/28/2012	5:54:34 PM	PH3 valve closed
6/28/2012	5:54:34 PM	SiCl4 pre valve closed
6/28/2012	5:54:34 PM	SiCl4 post valve closed
6/28/2012	5:54:34 PM	Bypass valve closed
6/28/2012	5:54:34 PM	Bubbler valve closed
6/28/2012	5:54:34 PM	Helium valve opened
6/28/2012	5:54:34 PM	Main Vac valve opened
6/28/2012	5:54:34 PM	Helium MFC set to  20.000000
6/28/2012	5:54:34 PM	H2 MFC set to  0.000000
6/28/2012	5:54:34 PM	BCl3 MFC set to  0.000000
6/28/2012	5:54:34 PM	PH3 MFC set to  0.000000
6/28/2012	5:54:34 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:54:34 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:54:34 PM	Tube furnace set to 0
6/28/2012	5:55:04 PM	Helium valve closed
6/28/2012	5:55:04 PM	H2 valve closed
6/28/2012	5:55:04 PM	BCl3 valve closed
6/28/2012	5:55:04 PM	PH3 valve closed
6/28/2012	5:55:04 PM	SiCl4 pre valve closed
6/28/2012	5:55:04 PM	SiCl4 post valve closed
6/28/2012	5:55:04 PM	Bypass valve closed
6/28/2012	5:55:04 PM	Bubbler valve closed
6/28/2012	5:55:04 PM	Main Vac valve opened
6/28/2012	5:55:04 PM	Helium MFC set to  0.000000
6/28/2012	5:55:04 PM	H2 MFC set to  0.000000
6/28/2012	5:55:04 PM	BCl3 MFC set to  0.000000
6/28/2012	5:55:04 PM	PH3 MFC set to  0.000000
6/28/2012	5:55:04 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:55:04 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:55:04 PM	Tube furnace set to 0
6/28/2012	5:55:34 PM	H2 valve closed
6/28/2012	5:55:34 PM	BCl3 valve closed
6/28/2012	5:55:34 PM	PH3 valve closed
6/28/2012	5:55:34 PM	SiCl4 pre valve closed
6/28/2012	5:55:34 PM	SiCl4 post valve closed
6/28/2012	5:55:34 PM	Bypass valve closed
6/28/2012	5:55:34 PM	Bubbler valve closed
6/28/2012	5:55:34 PM	Helium valve opened
6/28/2012	5:55:34 PM	Main Vac valve opened
6/28/2012	5:55:34 PM	Helium MFC set to  20.000000
6/28/2012	5:55:34 PM	H2 MFC set to  0.000000
6/28/2012	5:55:34 PM	BCl3 MFC set to  0.000000
6/28/2012	5:55:34 PM	PH3 MFC set to  0.000000
6/28/2012	5:55:34 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:55:34 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:55:35 PM	Tube furnace set to 0
6/28/2012	5:56:05 PM	Helium valve closed
6/28/2012	5:56:05 PM	H2 valve closed
6/28/2012	5:56:05 PM	BCl3 valve closed
6/28/2012	5:56:05 PM	PH3 valve closed
6/28/2012	5:56:05 PM	SiCl4 pre valve closed
6/28/2012	5:56:05 PM	SiCl4 post valve closed
6/28/2012	5:56:05 PM	Bypass valve closed
6/28/2012	5:56:05 PM	Bubbler valve closed
6/28/2012	5:56:05 PM	Main Vac valve opened
6/28/2012	5:56:05 PM	Helium MFC set to  0.000000
6/28/2012	5:56:05 PM	H2 MFC set to  0.000000
6/28/2012	5:56:05 PM	BCl3 MFC set to  0.000000
6/28/2012	5:56:05 PM	PH3 MFC set to  0.000000
6/28/2012	5:56:05 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:56:05 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:56:05 PM	Tube furnace set to 0
6/28/2012	5:56:35 PM	H2 valve closed
6/28/2012	5:56:35 PM	BCl3 valve closed
6/28/2012	5:56:35 PM	PH3 valve closed
6/28/2012	5:56:35 PM	SiCl4 pre valve closed
6/28/2012	5:56:35 PM	SiCl4 post valve closed
6/28/2012	5:56:35 PM	Bypass valve closed
6/28/2012	5:56:35 PM	Bubbler valve closed
6/28/2012	5:56:35 PM	Helium valve opened
6/28/2012	5:56:35 PM	Main Vac valve opened
6/28/2012	5:56:35 PM	Helium MFC set to  20.000000
6/28/2012	5:56:35 PM	H2 MFC set to  0.000000
6/28/2012	5:56:35 PM	BCl3 MFC set to  0.000000
6/28/2012	5:56:35 PM	PH3 MFC set to  0.000000
6/28/2012	5:56:35 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:56:35 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:56:35 PM	Tube furnace set to 0
6/28/2012	5:57:05 PM	Helium valve closed
6/28/2012	5:57:05 PM	H2 valve closed
6/28/2012	5:57:05 PM	BCl3 valve closed
6/28/2012	5:57:05 PM	PH3 valve closed
6/28/2012	5:57:05 PM	SiCl4 pre valve closed
6/28/2012	5:57:05 PM	SiCl4 post valve closed
6/28/2012	5:57:05 PM	Bypass valve closed
6/28/2012	5:57:05 PM	Bubbler valve closed
6/28/2012	5:57:05 PM	Main Vac valve opened
6/28/2012	5:57:05 PM	Helium MFC set to  0.000000
6/28/2012	5:57:05 PM	H2 MFC set to  0.000000
6/28/2012	5:57:05 PM	BCl3 MFC set to  0.000000
6/28/2012	5:57:05 PM	PH3 MFC set to  0.000000
6/28/2012	5:57:05 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:57:05 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:57:05 PM	Tube furnace set to 0
6/28/2012	5:57:35 PM	H2 valve closed
6/28/2012	5:57:35 PM	BCl3 valve closed
6/28/2012	5:57:35 PM	PH3 valve closed
6/28/2012	5:57:35 PM	SiCl4 pre valve closed
6/28/2012	5:57:35 PM	SiCl4 post valve closed
6/28/2012	5:57:35 PM	Bypass valve closed
6/28/2012	5:57:35 PM	Bubbler valve closed
6/28/2012	5:57:35 PM	Helium valve opened
6/28/2012	5:57:35 PM	Main Vac valve opened
6/28/2012	5:57:35 PM	Helium MFC set to  20.000000
6/28/2012	5:57:35 PM	H2 MFC set to  0.000000
6/28/2012	5:57:35 PM	BCl3 MFC set to  0.000000
6/28/2012	5:57:35 PM	PH3 MFC set to  0.000000
6/28/2012	5:57:35 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:57:35 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:57:35 PM	Tube furnace set to 0
6/28/2012	5:58:05 PM	Helium valve closed
6/28/2012	5:58:05 PM	H2 valve closed
6/28/2012	5:58:05 PM	BCl3 valve closed
6/28/2012	5:58:05 PM	PH3 valve closed
6/28/2012	5:58:06 PM	SiCl4 pre valve closed
6/28/2012	5:58:06 PM	SiCl4 post valve closed
6/28/2012	5:58:06 PM	Bypass valve closed
6/28/2012	5:58:06 PM	Bubbler valve closed
6/28/2012	5:58:06 PM	Main Vac valve opened
6/28/2012	5:58:06 PM	Helium MFC set to  0.000000
6/28/2012	5:58:06 PM	H2 MFC set to  0.000000
6/28/2012	5:58:06 PM	BCl3 MFC set to  0.000000
6/28/2012	5:58:06 PM	PH3 MFC set to  0.000000
6/28/2012	5:58:06 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:58:06 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:58:06 PM	Tube furnace set to 0
6/28/2012	5:58:36 PM	H2 valve closed
6/28/2012	5:58:36 PM	BCl3 valve closed
6/28/2012	5:58:36 PM	PH3 valve closed
6/28/2012	5:58:36 PM	SiCl4 pre valve closed
6/28/2012	5:58:36 PM	SiCl4 post valve closed
6/28/2012	5:58:36 PM	Bypass valve closed
6/28/2012	5:58:36 PM	Bubbler valve closed
6/28/2012	5:58:36 PM	Helium valve opened
6/28/2012	5:58:36 PM	Main Vac valve opened
6/28/2012	5:58:36 PM	Helium MFC set to  20.000000
6/28/2012	5:58:36 PM	H2 MFC set to  0.000000
6/28/2012	5:58:36 PM	BCl3 MFC set to  0.000000
6/28/2012	5:58:36 PM	PH3 MFC set to  0.000000
6/28/2012	5:58:36 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:58:36 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:58:36 PM	Tube furnace set to 0
6/28/2012	5:59:06 PM	Helium valve closed
6/28/2012	5:59:06 PM	H2 valve closed
6/28/2012	5:59:06 PM	BCl3 valve closed
6/28/2012	5:59:06 PM	PH3 valve closed
6/28/2012	5:59:06 PM	SiCl4 pre valve closed
6/28/2012	5:59:06 PM	SiCl4 post valve closed
6/28/2012	5:59:06 PM	Bypass valve closed
6/28/2012	5:59:06 PM	Bubbler valve closed
6/28/2012	5:59:06 PM	Main Vac valve opened
6/28/2012	5:59:06 PM	Helium MFC set to  0.000000
6/28/2012	5:59:06 PM	H2 MFC set to  0.000000
6/28/2012	5:59:06 PM	BCl3 MFC set to  0.000000
6/28/2012	5:59:06 PM	PH3 MFC set to  0.000000
6/28/2012	5:59:06 PM	SiCl4 MFC set to  0.000000
6/28/2012	5:59:06 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	5:59:06 PM	Tube furnace set to 0
6/28/2012	5:59:07 PM	Run finished at 5:59 PM
6/28/2012	5:59:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/28/2012	6:03:36 PM	Recipe started at 6:03 PM
6/28/2012	6:03:36 PM	Helium valve closed
6/28/2012	6:03:36 PM	H2 valve closed
6/28/2012	6:03:36 PM	BCl3 valve closed
6/28/2012	6:03:36 PM	PH3 valve closed
6/28/2012	6:03:36 PM	SiCl4 pre valve closed
6/28/2012	6:03:36 PM	SiCl4 post valve closed
6/28/2012	6:03:36 PM	Main Vac valve closed
6/28/2012	6:03:36 PM	Bypass valve closed
6/28/2012	6:03:36 PM	Bubbler valve closed
6/28/2012	6:03:36 PM	Helium MFC set to  0.000000
6/28/2012	6:03:36 PM	H2 MFC set to  0.000000
6/28/2012	6:03:36 PM	BCl3 MFC set to  0.000000
6/28/2012	6:03:36 PM	PH3 MFC set to  0.000000
6/28/2012	6:03:36 PM	SiCl4 MFC set to  0.000000
6/28/2012	6:03:36 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	6:03:36 PM	Tube furnace set to 0
6/28/2012	6:03:39 PM	Helium valve closed
6/28/2012	6:03:39 PM	BCl3 valve closed
6/28/2012	6:03:39 PM	PH3 valve closed
6/28/2012	6:03:39 PM	SiCl4 pre valve closed
6/28/2012	6:03:39 PM	SiCl4 post valve closed
6/28/2012	6:03:39 PM	Main Vac valve closed
6/28/2012	6:03:39 PM	Bypass valve closed
6/28/2012	6:03:39 PM	Bubbler valve closed
6/28/2012	6:03:39 PM	H2 valve opened
6/28/2012	6:03:39 PM	Helium MFC set to  0.000000
6/28/2012	6:03:39 PM	H2 MFC set to  500.000000
6/28/2012	6:03:39 PM	BCl3 MFC set to  0.000000
6/28/2012	6:03:39 PM	PH3 MFC set to  0.000000
6/28/2012	6:03:39 PM	SiCl4 MFC set to  0.000000
6/28/2012	6:03:39 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	6:03:39 PM	Tube furnace set to 0
6/28/2012	6:04:56 PM	Helium valve closed
6/28/2012	6:04:56 PM	BCl3 valve closed
6/28/2012	6:04:56 PM	PH3 valve closed
6/28/2012	6:04:56 PM	SiCl4 pre valve closed
6/28/2012	6:04:56 PM	SiCl4 post valve closed
6/28/2012	6:04:56 PM	Main Vac valve closed
6/28/2012	6:04:56 PM	Bypass valve closed
6/28/2012	6:04:56 PM	H2 valve opened
6/28/2012	6:04:56 PM	Bubbler valve opened
6/28/2012	6:04:56 PM	Helium MFC set to  0.000000
6/28/2012	6:04:56 PM	H2 MFC set to  500.000000
6/28/2012	6:04:56 PM	BCl3 MFC set to  0.000000
6/28/2012	6:04:56 PM	PH3 MFC set to  0.000000
6/28/2012	6:04:56 PM	SiCl4 MFC set to  0.000000
6/28/2012	6:04:56 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	6:04:56 PM	Tube furnace set to 0
6/28/2012	6:04:57 PM	Helium valve closed
6/28/2012	6:04:57 PM	BCl3 valve closed
6/28/2012	6:04:57 PM	PH3 valve closed
6/28/2012	6:04:57 PM	SiCl4 pre valve closed
6/28/2012	6:04:57 PM	SiCl4 post valve closed
6/28/2012	6:04:57 PM	Main Vac valve closed
6/28/2012	6:04:57 PM	Bypass valve closed
6/28/2012	6:04:57 PM	H2 valve opened
6/28/2012	6:04:57 PM	Bubbler valve opened
6/28/2012	6:04:57 PM	Helium MFC set to  0.000000
6/28/2012	6:04:57 PM	H2 MFC set to  500.000000
6/28/2012	6:04:57 PM	BCl3 MFC set to  0.000000
6/28/2012	6:04:57 PM	PH3 MFC set to  0.000000
6/28/2012	6:04:57 PM	SiCl4 MFC set to  0.000000
6/28/2012	6:04:57 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	6:04:57 PM	Tube furnace set to 1000
6/28/2012	6:24:57 PM	Helium valve closed
6/28/2012	6:24:57 PM	PH3 valve closed
6/28/2012	6:24:57 PM	Main Vac valve closed
6/28/2012	6:24:57 PM	Bypass valve closed
6/28/2012	6:24:57 PM	H2 valve opened
6/28/2012	6:24:57 PM	BCl3 valve opened
6/28/2012	6:24:57 PM	SiCl4 pre valve opened
6/28/2012	6:24:57 PM	SiCl4 post valve opened
6/28/2012	6:24:57 PM	Bubbler valve opened
6/28/2012	6:24:57 PM	Helium MFC set to  0.000000
6/28/2012	6:24:57 PM	H2 MFC set to  500.000000
6/28/2012	6:24:57 PM	BCl3 MFC set to  1.000000
6/28/2012	6:24:57 PM	PH3 MFC set to  0.000000
6/28/2012	6:24:57 PM	SiCl4 MFC set to  50.000000
6/28/2012	6:24:57 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	6:24:57 PM	Tube furnace set to 1000
6/28/2012	6:44:57 PM	Helium valve closed
6/28/2012	6:44:57 PM	BCl3 valve closed
6/28/2012	6:44:57 PM	PH3 valve closed
6/28/2012	6:44:57 PM	SiCl4 pre valve closed
6/28/2012	6:44:57 PM	SiCl4 post valve closed
6/28/2012	6:44:57 PM	Main Vac valve closed
6/28/2012	6:44:57 PM	Bypass valve closed
6/28/2012	6:44:57 PM	H2 valve opened
6/28/2012	6:44:57 PM	Bubbler valve opened
6/28/2012	6:44:57 PM	Helium MFC set to  0.000000
6/28/2012	6:44:57 PM	H2 MFC set to  500.000000
6/28/2012	6:44:57 PM	BCl3 MFC set to  0.000000
6/28/2012	6:44:57 PM	PH3 MFC set to  0.000000
6/28/2012	6:44:57 PM	SiCl4 MFC set to  0.000000
6/28/2012	6:44:57 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	6:44:57 PM	Tube furnace set to 750
6/28/2012	6:46:27 PM	H2 valve closed
6/28/2012	6:46:27 PM	BCl3 valve closed
6/28/2012	6:46:27 PM	PH3 valve closed
6/28/2012	6:46:27 PM	SiCl4 pre valve closed
6/28/2012	6:46:27 PM	SiCl4 post valve closed
6/28/2012	6:46:27 PM	Main Vac valve closed
6/28/2012	6:46:27 PM	Bypass valve closed
6/28/2012	6:46:27 PM	Helium valve opened
6/28/2012	6:46:27 PM	Bubbler valve opened
6/28/2012	6:46:27 PM	Helium MFC set to  500.000000
6/28/2012	6:46:27 PM	H2 MFC set to  0.000000
6/28/2012	6:46:27 PM	BCl3 MFC set to  0.000000
6/28/2012	6:46:27 PM	PH3 MFC set to  0.000000
6/28/2012	6:46:27 PM	SiCl4 MFC set to  0.000000
6/28/2012	6:46:27 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	6:46:27 PM	Tube furnace set to 0
6/28/2012	7:06:27 PM	Helium valve closed
6/28/2012	7:06:27 PM	H2 valve closed
6/28/2012	7:06:27 PM	BCl3 valve closed
6/28/2012	7:06:27 PM	PH3 valve closed
6/28/2012	7:06:27 PM	SiCl4 pre valve closed
6/28/2012	7:06:27 PM	SiCl4 post valve closed
6/28/2012	7:06:27 PM	Main Vac valve closed
6/28/2012	7:06:27 PM	Bypass valve closed
6/28/2012	7:06:27 PM	Bubbler valve closed
6/28/2012	7:06:27 PM	Helium MFC set to  0.000000
6/28/2012	7:06:27 PM	H2 MFC set to  0.000000
6/28/2012	7:06:27 PM	BCl3 MFC set to  0.000000
6/28/2012	7:06:27 PM	PH3 MFC set to  0.000000
6/28/2012	7:06:27 PM	SiCl4 MFC set to  0.000000
6/28/2012	7:06:27 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	7:06:27 PM	Tube furnace set to 0
6/28/2012	7:06:28 PM	Run finished at 7:06 PM
6/28/2012	7:09:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2012	7:09:34 PM	Recipe started at 7:09 PM
6/28/2012	7:09:34 PM	Helium valve closed
6/28/2012	7:09:34 PM	H2 valve closed
6/28/2012	7:09:34 PM	BCl3 valve closed
6/28/2012	7:09:34 PM	PH3 valve closed
6/28/2012	7:09:34 PM	SiCl4 pre valve closed
6/28/2012	7:09:34 PM	SiCl4 post valve closed
6/28/2012	7:09:34 PM	Main Vac valve closed
6/28/2012	7:09:34 PM	Bypass valve closed
6/28/2012	7:09:34 PM	Bubbler valve closed
6/28/2012	7:09:34 PM	Helium MFC set to  0.000000
6/28/2012	7:09:34 PM	H2 MFC set to  0.000000
6/28/2012	7:09:34 PM	BCl3 MFC set to  0.000000
6/28/2012	7:09:34 PM	PH3 MFC set to  0.000000
6/28/2012	7:09:34 PM	SiCl4 MFC set to  0.000000
6/28/2012	7:09:34 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	7:09:34 PM	Tube furnace set to 0
6/28/2012	7:09:37 PM	H2 valve closed
6/28/2012	7:09:37 PM	BCl3 valve closed
6/28/2012	7:09:37 PM	PH3 valve closed
6/28/2012	7:09:37 PM	SiCl4 pre valve closed
6/28/2012	7:09:37 PM	SiCl4 post valve closed
6/28/2012	7:09:37 PM	Main Vac valve closed
6/28/2012	7:09:37 PM	Bypass valve closed
6/28/2012	7:09:37 PM	Bubbler valve closed
6/28/2012	7:09:37 PM	Helium valve opened
6/28/2012	7:09:37 PM	Helium MFC set to  500.000000
6/28/2012	7:09:37 PM	H2 MFC set to  0.000000
6/28/2012	7:09:37 PM	BCl3 MFC set to  0.000000
6/28/2012	7:09:37 PM	PH3 MFC set to  0.000000
6/28/2012	7:09:37 PM	SiCl4 MFC set to  0.000000
6/28/2012	7:09:37 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	7:09:37 PM	Tube furnace set to 0
6/28/2012	7:09:37 PM	Helium valve closed
6/28/2012	7:09:37 PM	H2 valve closed
6/28/2012	7:09:37 PM	BCl3 valve closed
6/28/2012	7:09:37 PM	PH3 valve closed
6/28/2012	7:09:37 PM	SiCl4 pre valve closed
6/28/2012	7:09:37 PM	SiCl4 post valve closed
6/28/2012	7:09:37 PM	Main Vac valve closed
6/28/2012	7:09:37 PM	Bypass valve closed
6/28/2012	7:09:37 PM	Bubbler valve closed
6/28/2012	7:09:37 PM	Helium MFC set to  0.000000
6/28/2012	7:09:38 PM	H2 MFC set to  0.000000
6/28/2012	7:09:38 PM	BCl3 MFC set to  0.000000
6/28/2012	7:09:38 PM	PH3 MFC set to  0.000000
6/28/2012	7:09:38 PM	SiCl4 MFC set to  0.000000
6/28/2012	7:09:38 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	7:09:38 PM	Tube furnace set to 0
6/28/2012	7:09:39 PM	Run finished at 7:09 PM
6/28/2012	7:09:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2012	7:12:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2012	7:12:02 PM	Recipe started at 7:12 PM
6/28/2012	7:12:02 PM	Helium valve closed
6/28/2012	7:12:02 PM	H2 valve closed
6/28/2012	7:12:02 PM	BCl3 valve closed
6/28/2012	7:12:02 PM	PH3 valve closed
6/28/2012	7:12:02 PM	SiCl4 pre valve closed
6/28/2012	7:12:02 PM	SiCl4 post valve closed
6/28/2012	7:12:02 PM	Main Vac valve closed
6/28/2012	7:12:02 PM	Bubbler valve closed
6/28/2012	7:12:02 PM	Bypass valve opened
6/28/2012	7:12:02 PM	Helium MFC set to  0.000000
6/28/2012	7:12:02 PM	H2 MFC set to  0.000000
6/28/2012	7:12:02 PM	BCl3 MFC set to  0.000000
6/28/2012	7:12:02 PM	PH3 MFC set to  0.000000
6/28/2012	7:12:02 PM	SiCl4 MFC set to  0.000000
6/28/2012	7:12:02 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	7:12:02 PM	Tube furnace set to 0
6/28/2012	7:13:09 PM	Helium valve closed
6/28/2012	7:13:09 PM	H2 valve closed
6/28/2012	7:13:09 PM	BCl3 valve closed
6/28/2012	7:13:09 PM	PH3 valve closed
6/28/2012	7:13:09 PM	SiCl4 pre valve closed
6/28/2012	7:13:09 PM	SiCl4 post valve closed
6/28/2012	7:13:09 PM	Main Vac valve closed
6/28/2012	7:13:09 PM	Bubbler valve closed
6/28/2012	7:13:09 PM	Bypass valve opened
6/28/2012	7:13:09 PM	Helium MFC set to  0.000000
6/28/2012	7:13:09 PM	H2 MFC set to  0.000000
6/28/2012	7:13:09 PM	BCl3 MFC set to  0.000000
6/28/2012	7:13:09 PM	PH3 MFC set to  0.000000
6/28/2012	7:13:09 PM	SiCl4 MFC set to  0.000000
6/28/2012	7:13:09 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	7:13:10 PM	Tube furnace set to 0
6/28/2012	7:14:10 PM	Helium valve closed
6/28/2012	7:14:10 PM	H2 valve closed
6/28/2012	7:14:10 PM	BCl3 valve closed
6/28/2012	7:14:10 PM	PH3 valve closed
6/28/2012	7:14:10 PM	SiCl4 pre valve closed
6/28/2012	7:14:10 PM	SiCl4 post valve closed
6/28/2012	7:14:10 PM	Bypass valve closed
6/28/2012	7:14:10 PM	Bubbler valve closed
6/28/2012	7:14:10 PM	Main Vac valve opened
6/28/2012	7:14:10 PM	Helium MFC set to  0.000000
6/28/2012	7:14:10 PM	H2 MFC set to  0.000000
6/28/2012	7:14:10 PM	BCl3 MFC set to  0.000000
6/28/2012	7:14:10 PM	PH3 MFC set to  0.000000
6/28/2012	7:14:10 PM	SiCl4 MFC set to  0.000000
6/28/2012	7:14:10 PM	Bypass solenoid MFC set to  0.000000
6/28/2012	7:14:10 PM	Tube furnace set to 0
6/28/2012	7:14:11 PM	Run finished at 7:14 PM
6/28/2012	7:14:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
